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class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">鏅跺渾娓呮礂鏈哄湪鍗婂浣撳埗閫犱腑鐨勪綔鐢?/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px">鏅跺渾娓呮礂鏈哄湪鍗婂浣撳埗閫犱腑鎵紨鐫€<strong>鏍稿績瑙掕壊</strong>锛屽叾浣滅敤璐┛鏁翠釜鏅跺渾鍒堕€犳祦绋嬶紝鐩存帴褰卞搷鑺墖鑹巼銆佹€ц兘鍜屽彲闈犳€с€備互涓嬫槸鍏跺叧閿綔鐢ㄣ€佹妧鏈師鐞嗗強搴旂敤鍦烘櫙鐨勮缁嗚В鏋愶細</span></p> <h3><span style="font-size:16px"><strong>涓€銆佹櫠鍦嗘竻娲楃殑鏍稿績浣滅敤</strong></span></h3> <ol> <li> <p><span style="font-size:16px"><strong>鍘婚櫎姹℃煋鐗?/strong></span></p> <ul> <li><span style="font-size:16px"><strong>棰楃矑姹℃煋</strong>锛?.1 μm浠ヤ笂锛夛細鍏夊埢鑳舵畫鐣欍€佹姏鍏夌矇灏樼瓑锛屼細瀵艰嚧鐭矾鎴栨柇璺€侟/span></li> <li><span style="font-size:16px"><strong>鏈夋満鐗╂薄鏌掽/strong>锛堝鍏夊埢鑳躲€佹补娓嶏級锛氬奖鍝嶅厜鍒诲浘褰㈢簿搴﹀拰钖勮啘娌夌Н鍧囧寑鎬с€侟/span></li> <li><span style="font-size:16px"><strong>閲戝睘绂诲瓙姹℃煋</strong>锛堝Na鈦恒€丗e³鈦猴級锛氬鑷村崐瀵间綋鍣ㄤ欢婕忕數娴佸鍔犮€侀槇鍊肩數鍘嬫紓绉汇€侟/span></li> <li><span style="font-size:16px"><strong>鑷劧姘у寲灞侟/strong>锛圫iO鈧傘€侀噾灞炴哀鍖栫墿锛夛細闃荤钖勮啘娌夌Н鎴栨幒鏉傚伐鑹恒€侟/span></li> </ul> </li> <li> <p><span style="font-size:16px"><strong>淇濋殰宸ヨ壓绋冲畾鎬?/strong></span></p> <ul> <li><span style="font-size:16px">娓呮礂鍚庤〃闈㈤渶杈惧埌鍘熷瓙绾ф磥鍑€搴︼紙閲戝睘绂诲瓙娴撳害<1×10¹鈦 atoms/cm²锛夛紝纭繚鍏夊埢瀵瑰噯銆佽殌鍒婚€夋嫨鎬х瓑鍏抽敭宸ヨ壓鐨勭簿鍑嗘€с€侟/span></li> </ul> </li> <li> <p><span style="font-size:16px"><strong>寤堕暱璁惧瀵垮懡</strong></span></p> <ul> <li><span style="font-size:16px">鍑忓皯姹℃煋鐗╁湪鑵斿銆佹帺妯＄増绛夊叧閿儴浠剁殑闄勭潃锛岄檷浣庤澶囩淮鎶ら鐜囥€侟/span></li> </ul> </li> </ol> <h3><span style="font-size:16px"><strong>浜屻€?a href="/">鏅跺渾娓呮礂鏈裹/a>鐨勫伐浣滃師鐞嗕笌鍒嗙被</strong></span></h3> <h4><span style="font-size:16px"><strong>1. 涓绘祦娓呮礂鎶€鏈?/strong></span></h4> <table> <thead> <tr> <th><span style="font-size:16px"><strong>鎶€鏈被鍨婞/strong></span></th> <th><span style="font-size:16px"><strong>鍘熺悊</strong></span></th> <th><span style="font-size:16px"><strong>閫傜敤鍦烘櫙</strong></span></th> </tr> </thead> <tbody> <tr> <td><span style="font-size:16px"><strong>婀挎硶鍖栧娓呮礂</strong></span></td> <td><span style="font-size:16px">鍒╃敤閰?纰辨憾娑诧紙濡侶鈧係O鈧?H鈧侽鈧傘€丯H鈧?middot;H鈧侽/H鈧侽鈧傦級婧惰В姹℃煋鐗╋紝缁撳悎瓒呭０娉?鍏嗗０娉㈣緟鍔╁幓姹°€侟/span></td> <td><span style="font-size:16px">鍘婚櫎棰楃矑銆佹湁鏈虹墿銆侀噾灞炵瀛愶紙RCA鏍囧噯娴佺▼锛夈€侟/span></td> </tr> <tr> <td><span style="font-size:16px"><strong>骞叉硶娓呮礂</strong></span></td> <td><span style="font-size:16px">绛夌瀛愪綋锛圤鈧傘€丆F鈧勶級鎴栬嚟姘э紙O鈧冿級姘у寲琛ㄩ潰姹℃煋鐗╋紝缁撳悎鐪熺┖鎶界銆侟/span></td> <td><span style="font-size:16px">鍘婚櫎鍏夊埢鑳舵畫娓ｃ€佽嚜鐒舵哀鍖栧眰锛堟棤姘寸幆澧冿級銆侟/span></td> </tr> <tr> <td><span style="font-size:16px"><strong>姘斾綋鍠峰皠娓呮礂</strong></span></td> <td><span style="font-size:16px">楂樺帇姘皵鎴栨癌姘斿柗灏勫幓闄ら绮掞紝缁撳悎鐪熺┖鍚搁檮鏀堕泦銆侟/span></td> <td><span style="font-size:16px">绮楁竻娲楁垨鐗瑰畾鍖哄煙鐨勫眬閮ㄦ竻娲併€侟/span></td> </tr> <tr> <td><span style="font-size:16px"><strong>鐢靛寲瀛︽竻娲桙/strong></span></td> <td><span style="font-size:16px">鐢佃В娑蹭腑鐨勭數鏋佸弽搴旈€夋嫨鎬ф憾瑙ｉ噾灞炴薄鏌撶墿銆侟/span></td> <td><span style="font-size:16px">楂樼簿搴﹂噾灞炵瀛愬幓闄わ紙濡傞摐鍒剁▼锛夈€侟/span></td> </tr> </tbody> </table> <h4><span style="font-size:16px"><strong>2. 鍏稿瀷璁惧缁撴瀯</strong></span></h4> <ul> <li><span style="font-size:16px"><strong>娓呮礂妲键/strong>锛氬妲戒覆鑱旇璁★紙濡係C-1/SC-2娓呮礂搴忓垪锛夛紝閰嶅娓╁害鎺у埗锛?plusmn;0.5°C锛夈€侟/span></li> <li><span style="font-size:16px"><strong>鍠锋穻绯荤粺</strong>锛氶珮鍘嬪柗鍢达紙鍘嬪姏10-50 psi锛夌‘淇濇憾娑插潎鍖€瑕嗙洊鏅跺渾琛ㄩ潰銆侟/span></li> <li><span style="font-size:16px"><strong>瓒呯函姘达紙DIW锛夊啿娲桙/strong>锛氱數闃荤巼>18.2 MΩ·cm锛屾祦閫熸帶鍒堕伩鍏嶆畫鐣欍€侟/span></li> <li><span style="font-size:16px"><strong>骞茬嚗妯″潡</strong>锛氭爱姘斿惞鎵垨鏃嬭浆骞茬嚗锛圡arangoni骞茬嚗鎶€鏈級銆侟/span></li> </ul> <h3><span style="font-size:16px"><strong>涓夈€佸叧閿伐鑹鸿妭鐐圭殑娓呮礂闇€姹侟/strong></span></h3> <h4><span style="font-size:16px"><strong>1. 鍏夊埢鍓嶆竻娲桙/strong></span></h4> <ul> <li><span style="font-size:16px"><strong>鐩爣</strong>锛氬交搴曞幓闄ら绮掑拰鏈夋満鐗╋紝纭繚鍏夊埢鑳舵秱瑕嗗潎鍖€銆侟/span></li> <li><span style="font-size:16px"><strong>鏂规硶</strong>锛歊CA鏍囧噯娓呮礂锛圢H鈧?middot;H鈧侽:H鈧侽鈧侜H鈧侽=1:1:5 → HCl:H鈧侽鈧侜H鈧侽=1:1:6锛夈€侟/span></li> </ul> <h4><span style="font-size:16px"><strong>2. 铓€鍒诲悗娓呮礂</strong></span></h4> <ul> <li><span style="font-size:16px"><strong>鐩爣</strong>锛氭竻闄よ殌鍒诲壇浜х墿锛堝SiO鈧傛畫娓ｃ€侀噾灞炴畫鐣欙級銆侟/span></li> <li><span style="font-size:16px"><strong>鏂规硶</strong>锛欻F/HNO鈧冩贩鍚堟恫鍘婚櫎姘у寲灞傦紝鑷哀姘存哀鍖栨湁鏈烘畫鐣欍€侟/span></li> </ul> <h4><span style="font-size:16px"><strong>3. 鍖栧姘旂浉娌夌Н锛圕VD锛夊墠娓呮礂</strong></span></h4> <ul> <li><span style="font-size:16px"><strong>鐩爣</strong>锛氬幓闄よ嚜鐒舵哀鍖栧眰鍜屽惛闄勫垎瀛愶紝纭繚钖勮啘鐣岄潰璐ㄩ噺銆侟/span></li> <li><span style="font-size:16px"><strong>鏂规硶</strong>锛氳繙绋嬬瓑绂诲瓙浣撴竻娲楋紙RIE妯″紡锛夋垨绋€閲奌F锛圖HF锛夊鐞嗐€侟/span></li> </ul> <h4><span style="font-size:16px"><strong>4. 鏅跺渾閿悎鍓嶆竻娲桙/strong></span></h4> <ul> <li><span style="font-size:16px"><strong>鐩爣</strong>锛氬疄鐜板師瀛愮骇娲佸噣琛ㄩ潰锛堝Si-Si閿悎闇€琛ㄩ潰绮楃硻搴a<0.5 nm锛夈€侟/span></li> <li><span style="font-size:16px"><strong>鏂规硶</strong>锛氭阿姘熼吀锛圚F锛?鑷哀锛圤鈧冿級鍙岄噸娓呮礂锛圫mart Cut®宸ヨ壓锛夈€侟/span></li> </ul> <h3><span style="font-size:16px"><strong>鍥涖€佸厛杩涘埗绋嬩腑鐨勬竻娲楁寫鎴楛/strong></span></h3> <ol> <li> <p><span style="font-size:16px"><strong>3nm/2nm鑺傜偣鐨勬瀬闄愯姹侟/strong></span></p> <ul> <li><span style="font-size:16px">姹℃煋鐗╃矑寰勯渶鎺у埗鍦?lt;20 nm锛堜紶缁熸竻娲楅毦浠ュ幓闄わ級銆侟/span></li> <li><span style="font-size:16px">寮曞叆<strong>鍗曠矑瀛愭娴嬫妧鏈?/strong>锛堝SPM鎵弿鐢靛瓙鏄惧井闀滐級瀹炴椂鐩戞帶銆侟/span></li> </ul> </li> <li> <p><span style="font-size:16px"><strong>鏉愭枡鍏煎鎬ч棶棰楛/strong></span></p> <ul> <li><span style="font-size:16px">閽?閽屼簰杩炲伐鑹轰腑锛屽己閰革紙濡侶Cl锛変細瀵艰嚧閲戝睘鑵愯殌锛岄渶鏀圭敤<strong>浣庢俯鑷哀娓呮礂</strong>銆侟/span></li> </ul> </li> <li> <p><span style="font-size:16px"><strong>鐜繚涓庢垚鏈帇鍔汓/strong></span></p> <ul> <li><span style="font-size:16px">闄愬埗PFAS锛堝叏姘熷寲鍚堢墿锛夌殑浣跨敤锛屽紑鍙慄strong>缁胯壊娓呮礂娑秉/strong>锛堝鐢熺墿閰跺熀婧舵恫锛夈€侟/span></li> </ul> </li> </ol> <h3><span style="font-size:16px"><strong>浜斻€佹湭鏉ュ彂灞曡秼鍔军/strong></span></h3> <ol> <li><span style="font-size:16px"><strong>鏅鸿兘鍖栨竻娲楃郴缁烖/strong></span> <ul> <li><span style="font-size:16px">AI绠楁硶瀹炴椂璋冩暣娓呮礂鍙傛暟锛堝娓╁害銆佹祦閲忋€佹椂闂达級锛屼紭鍖栧伐鑹虹獥鍙ｃ€侟/span></li> </ul> </li> <li><span style="font-size:16px"><strong>骞叉硶娓呮礂涓诲鍖朁/strong></span> <ul> <li><span style="font-size:16px">绛夌瀛愪綋+鑷哀缁勫悎鎶€鏈崰姣旀彁鍗囷紙鍑忓皯瓒呯函姘存秷鑰楋紝闄嶄綆纰虫帓鏀撅級銆侟/span></li> </ul> </li> <li><span style="font-size:16px"><strong>鍗曠墖娓呮礂鎶€鏈?/strong></span> <ul> <li><span style="font-size:16px">鍗曠墖鏅跺渾娓呮礂鏈猴紙Single-Wafer Cleaner锛夊彇浠ｆ壒娆″紡璁惧锛屾彁鍗囧潎鍖€鎬с€侟/span></li> </ul> </li> </ol> <h3><span style="font-size:16px"><strong>鍏€佸吀鍨嬫晠闅滄渚嬩笌瀵圭瓥</strong></span></h3> <table> <thead> <tr> <th><span style="font-size:16px"><strong>闂</strong></span></th> <th><span style="font-size:16px"><strong>鍘熷洜</strong></span></th> <th><span style="font-size:16px"><strong>瑙ｅ喅鏂规</strong></span></th> </tr> </thead> <tbody> <tr> <td><span style="font-size:16px">棰楃矑鍐嶆薄鏌掽/span></td> <td><span style="font-size:16px">DIW鍐叉礂涓嶅厖鍒咟/span></td> <td><span style="font-size:16px">澧炲姞鏈€缁堝啿娲楁椂闂磋嚦3鍒嗛挓锛屼紭鍖栧柗娣嬭搴︺€侟/span></td> </tr> <tr> <td><span style="font-size:16px">閲戝睘绂诲瓙娈嬬暀</span></td> <td><span style="font-size:16px">娓呮礂娑瞤H鍊兼尝鍔?/span></td> <td><span style="font-size:16px">鍦ㄧ嚎鐩戞祴pH鍊硷紝浣跨敤缂撳啿婧舵恫锛堝NH鈧凮H锛夈€侟/span></td> </tr> <tr> <td><span style="font-size:16px">琛ㄩ潰绮楃硻搴﹁秴鏍嘃/span></td> <td><span style="font-size:16px">瓒呭０娉㈠姛鐜囪繃楂楛/span></td> <td><span style="font-size:16px">闄嶄綆鍔熺巼鑷?00 W浠ヤ笅锛屾敼鐢ㄥ厗澹版尝锛?0 kHz锛夈€侟/span></td> </tr> </tbody> </table> <h3><span style="font-size:16px"><strong>鎬荤粨</strong></span></h3> <p><span style="font-size:16px"><a href="/">鏅跺渾娓呮礂鏈裹/a>鏄崐瀵间綋鍒堕€犵殑“闅愬舰瀹堟姢鑰?rdquo;锛屽叾鏍稿績浠峰€煎湪浜庯細</span></p> <ol> <li><span style="font-size:16px"><strong>娑堥櫎鎵€鏈夋綔鍦ㄦ薄鏌撴簮</strong>锛屼负鍚庣画宸ヨ壓鎻愪緵娲佸噣鍩哄簳锛汓/span></li> <li><span style="font-size:16px"><strong>閫傞厤涓嶅悓鍒剁▼闇€姹侟/strong>锛屼粠鎴愮啛鑺傜偣鍒?nm鍏堣繘鍒剁▼锛汓/span></li> <li><span style="font-size:16px"><strong>骞宠　鏁堢巼銆佹垚鏈笌鐜繚</strong>锛屾帹鍔ㄤ骇涓氬彲鎸佺画鍙戝睍銆侟br /> 闅忕潃鎽╁皵瀹氬緥閫艰繎鏋侀檺锛屾竻娲楁妧鏈浠?ldquo;绮楁斁寮忔竻娲?rdquo;鍚慄strong>鍘熷瓙绾х簿鍑嗘帶鍒迭/strong>婕旇繘锛屾垚涓哄崐瀵间綋鍒堕€犱笉鍙浛浠ｇ殑鍏抽敭鐜妭銆傞樋</span></li> </ol> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index447.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 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