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鍑忚杽鏈裹/div>
鍗曢潰鎶涘厜鏈裹/div>
鍙岄潰鎶涘厜鏈裹/div>
CMP
璐寸墖鏈裹/div>
鍒锋礂鏈裹/div>
2025.04.07
琛屼笟璧勮
鏅跺渾鑳岄潰鍑忚杽閮芥湁鍝簺璁惧

鏅跺渾鑳岄潰鍑忚杽锛圵afer Backside Thinning锛夋槸鍗婂浣撳埗閫犲拰灏佽杩囩▼涓殑鍏抽敭姝ラ锛屼富瑕佺敤浜庡噺灏戞櫠鍦嗗帤搴︿互鎻愬崌鏁ｇ儹鎬ц兘銆佸噺灏忓皝瑁呭昂瀵告垨婊¤冻鍏堣繘灏佽闇€姹傦紙濡?D闆嗘垚锛夈€備互涓嬫槸甯哥敤鐨勮澶囧強鍏舵妧鏈垎绫伙細

1. 鏈烘鐮旂（璁惧锛圡echanical Grinding锛堻/strong>

  • 绮楃（鏈猴紙Coarse Grinding锛堻/strong>
    浣跨敤绮楃（杞紙濡傜⒊鍖栫鐮傝疆锛夊揩閫熷幓闄ゅぇ閮ㄥ垎鏅跺渾鑳岄潰鏉愭枡锛堝帤搴﹂€氬父 >100μm锛夛紝鏁堢巼楂樹絾琛ㄩ潰绮楃硻搴﹁緝澶с€侟/span>
  • 绮剧（鏈猴紙Fine Grinding锛堻/strong>
    閲囩敤缁嗙（杞紙濡傞噾鍒氱煶鐮傝疆锛夎繘琛岀簿缁嗙爺纾紝鍘氬害鍘婚櫎閲忛€氬父 <10μm锛岃〃闈㈢矖绯欏害杈冧綆锛堟暟鐧剧撼绫崇骇锛夈€侟/span>
  • 鍙岄潰鐮旂（鏈猴紙Double-Sided Grinding, DSG锛堻/strong>
    鍚屾椂鐮旂（鏅跺渾姝ｅ弽涓ら潰锛屼繚璇佸帤搴﹀潎鍖€鎬э紝閫傜敤浜庨珮绮惧害鍑忚杽锛堝瀛樺偍鑺墖灏佽锛夈€侟/span>

2. 鍖栧鏈烘鎶涘厜璁惧锛圕MP, Chemical Mechanical Polishing锛堻/strong>

  • 鐢ㄩ€擖/strong>锛氬湪鏈烘鐮旂（鍚庤繘涓€姝ュ钩鍧﹀寲琛ㄩ潰锛屽幓闄ゅ井瑁傜汗鍜屽簲鍔涳紝鎻愬崌琛ㄩ潰鍏夋磥搴︼紙绾崇背绾х矖绯欏害锛夈€侟/span>
  • 鐗圭偣锛氱粨鍚堝寲瀛﹁厫铓€涓庢満姊版姏鍏夛紝閫傜敤浜庡琛ㄩ潰璐ㄩ噺瑕佹眰楂樼殑鍦烘櫙锛堝MEMS鍣ㄤ欢鎴栧厛杩涘皝瑁咃級銆侟/span>

3. 婀挎硶铓€鍒昏澶囷紙Wet Etching锛堻/strong>

  • 鍘熺悊锛氬埄鐢ㄩ吀鎬ф垨纰辨€ф憾娑诧紙濡侶F銆丠NO鈧冩贩鍚堟恫锛夐€夋嫨鎬ц厫铓€鏅跺渾鑳岄潰鏉愭枡銆侟/span>
  • 搴旂敤锛氱敤浜庡幓闄ゆ満姊扮爺纾ㄥ悗鐨勬崯浼ゅ眰鎴栬皟鏁村帤搴︼紙寰背绾х簿搴︼級锛屼絾闅句互鎺у埗鍧囧寑鎬э紝澶氱敤浜庝綆澶嶆潅搴﹀伐鑹恒€侟/span>

4. 骞叉硶铓€鍒昏澶囷紙Dry Etching锛堻/strong>

  • 绛夌瀛愪綋铓€鍒伙紙Plasma Etching锛堻/strong>
    閫氳繃鍙嶅簲绂诲瓙铓€鍒伙紙RIE锛夋垨娣卞弽搴旂瀛愯殌鍒伙紙DRIE锛夋妧鏈紝浠ユ皵鐩稿寲瀛﹀弽搴旂簿纭幓闄ゆ潗鏂欙紝閫傚悎楂樼簿搴﹀噺钖勶紙浜氬井绫崇骇锛夈€侟/span>
  • 浼樺娍锛氬悇鍚戝紓鎬ц殌鍒伙紝鍙帶鍒朵晶澹佸瀭鐩村害锛岄€傜敤浜庡井缁撴瀯鎴栦紶鎰熷櫒鍒堕€犮€侟/span>

5. 婵€鍏夊姞宸ヨ澶嘃/strong>

  • 婵€鍏夊垏鍓?閽诲瓟
    浣跨敤绱婵€鍏夛紙濡俇V鐨婵€鍏夛級杩涜灞€閮ㄥ噺钖勬垨閽诲瓟锛岄€傜敤浜庡井鍨嬪寲鎴栧紓褰㈢粨鏋勫姞宸ャ€侟/span>
  • 婵€鍏夋姏鍏堻/strong>
    閫氳繃婵€鍏夌儳铓€瀹炵幇琛ㄩ潰骞虫暣鍖栵紝甯哥敤浜庝慨澶嶆満姊扮爺纾ㄦ崯浼ゃ€侟/span>

6. 娓呮礂涓庢娴嬭澶嘃/strong>

  • 婀挎硶娓呮礂鏈猴紙Wet Cleaner锛堻/strong>
    鍘婚櫎鍑忚杽杩囩▼涓骇鐢熺殑棰楃矑鍜屽寲瀛︽畫鐣欙紙濡備娇鐢⊿C-1銆丏HF婧舵恫锛夈€侟/span>
  • 鍘氬害娴嬮噺浠紙Ellipsometer/Profiling Tool锛堻/strong>
    瀹炴椂鐩戞帶鏅跺渾鍘氬害鍧囧寑鎬э紙濡傚厜瀛﹁疆寤撲华鎴栬秴澹版尝娴嬪帤浠級銆侟/span>
  • 琛ㄩ潰缂洪櫡妫€娴嬭澶嘃/strong>
    濡傚師瀛愬姏鏄惧井闀滐紙AFM锛夋垨鎵弿鐢靛瓙鏄惧井闀滐紙SEM锛夛紝鐢ㄤ簬鍒嗘瀽琛ㄩ潰绮楃硻搴﹀拰缂洪櫡銆侟/span>

宸ヨ壓娴佺▼绀轰緥

  1. 绮楃（ → 绮剧（ → 婀挎硶铓€鍒狐/strong>锛堝幓鎹熶激灞傦級 → CMP鎶涘厜 → 娓呮礂涓庢娴婞/strong>銆侟/span>
  2. 楂樼簿搴﹀満鏅彲鑳介噰鐢?nbsp;骞叉硶铓€鍒狐/strong> 鏇夸唬閮ㄥ垎鏈烘姝ラ锛屾垨鍦ㄦ縺鍏夎緟鍔╀笅瀹炵幇瓒呰杽鏅跺渾锛?lt;50μm锛夊姞宸ャ€侟/span>

鎶€鏈秼鍔军/strong>

  • 浣庡簲鍔涘噺钖凕/strong>锛氬紑鍙戜綆搴斿姏鐮旂（娑插拰鏌旀€у灚鐗囦互鍑忓皯鏅跺渾缈樻洸銆侟/span>
  • 娣峰悎宸ヨ壓锛氱粨鍚堟満姊扮爺纾ㄤ笌骞叉硶/婀挎硶铓€鍒伙紝骞宠　鏁堢巼涓庤〃闈㈣川閲忋€侟/span>
  • 瓒呰杽鏅跺渾澶勭悊锛氶拡瀵瑰厛杩涘皝瑁咃紙濡侳an-Out銆?D IC锛夐渶姹傦紝鍘氬害鍙噺鑷?0μm浠ヤ笅銆侟/span>

閫氳繃涓婅堪璁惧鐨勭粍鍚堝簲鐢紝鏅跺渾鑳岄潰鍑忚杽鎶€鏈兘澶熸弧瓒充笉鍚屽簲鐢ㄥ満鏅鍘氬害銆佽〃闈㈣川閲忓拰鐢熶骇鏁堢巼鐨勮姹傘€侟/span>

涓婁竴绡
鏅跺渾娓呮礂鏈哄湪鍗婂浣撳埗閫犱腑鐨勪綔鐢?/div>
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璇峰埛鏂伴〉闈紝閲嶆柊鎻愪氦銆侟/div>
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