2025.03.28
琛屼笟璧勮
鏅跺渾鑳岄潰鍑忚杽鐨勬渶浣虫柟娉曟槸浠€涔堬紵

鏅跺渾鑳岄潰鍑忚杽锛圔ackside Thinning锛夋槸鍗婂浣撳埗閫犱腑鐨勫叧閿伐鑹猴紝灏ゅ叾鍦ㄥ姛鐜囧櫒浠躲€丮EMS浼犳劅鍣ㄣ€?D闆嗘垚鍜岄珮瀵嗗害灏佽涓嚦鍏抽噸瑕併€傚叾鐩殑鏄噺灏忔櫠鍦嗗帤搴︺€侀噴鏀炬満姊板簲鍔涖€佹敼鍠勬暎鐑€ц兘鎴栦负鍚庣画灏佽鎻愪緵鐏垫椿鎬с€傞€夋嫨鏈€浣冲噺钖勬柟娉曢渶缁煎悎鑰冭檻鍘氬害瑕佹眰銆佹潗鏂欑壒鎬с€佽〃闈㈣川閲忋€佹垚鏈強宸ヨ壓鍏煎鎬?/strong>銆備互涓嬫槸涓绘祦鍑忚杽鎶€鏈殑瀵规瘮鍙婇€傜敤鍦烘櫙锛欬/p>

涓€銆佷富娴?a href="/">鏅跺渾鑳岄潰鍑忚杽鎶€鏈姣擖/strong>

鎶€鏈?/strong> 鍘熺悊 浼樺娍 灞€闄愭€?/strong> 鍏稿瀷搴旂敤
鏈烘鍖栧鎶涘厜锛圕MP锛堻/strong> 鏈烘鐮旂(+鍖栧鑵愯殌鍚屾浣滅敤 鍘氬害鍧囧寑鎬уソ锛?plusmn;1 μm锛夈€佽〃闈㈠钩鏁滁/td> 浜х敓琛ㄩ潰寰绾广€佹畫浣欏簲鍔汓/td> 纭呮櫠鍦嗐€丼OI鏅跺渾甯歌鍑忚杽
婀挎硶鍖栧铓€鍒狐/strong> 閰?纰辨憾娑查€夋嫨鎬ц厫铓€纭匋/td> 鏃犳満姊版崯浼ゃ€佽〃闈㈠厜婊慄/td> 鍧囧寑鎬у樊锛?plusmn;5-10 μm锛夈€侀€熺巼鎱↑/td> MEMS銆佸厜鐢靛櫒浠朵綆搴斿姏闇€姹侟/td>
绛夌瀛愪綋骞叉硶鍒昏殌 鍙嶅簲绂诲瓙鍒昏殌锛圧IE锛堻/td> 鍚勫悜寮傛€с€佹繁搴﹀彲鎺?/td> 娌夌Н鑱氬悎鐗╂薄鏌撱€佹垚鏈珮 绮惧瘑缁撴瀯锛堝TSV閫氬瓟锛夊噺钖凕/td>
鐮旂(+铓€鍒荤粨鍚圏/strong> 鏈烘鐮旂(鍚庡寲瀛﹁殌鍒讳慨澶嶆崯浼|/td> 鍏奸【鏁堢巼涓庤〃闈㈣川閲廃/td> 宸ヨ壓澶嶆潅銆佽澶囨垚鏈珮 瓒呰杽鏅跺渾锛?lt;50 μm锛堻/td>
婵€鍏夌儳铓€ 楂樿兘婵€鍏夎剦鍐插墺绂绘潗鏂橖/td> 闈炴帴瑙︺€佹棤鏈烘搴斿姏銆佽秴钖勫寲鑳藉姏 鐑奖鍝嶅尯澶с€佽竟缂樼矖绯橖/td> 鐗规畩鏉愭枡锛圙aN銆丟aAs锛夊噺钖凕/td>

浜屻€佹渶浣虫柟娉曢€夋嫨渚濇嵁

1. 鍘氬害瑕佹眰

  • 甯歌鍑忚杽锛?00-200 μm锛堻/strong>锛氭満姊板寲瀛︽姏鍏夛紙CMP锛変负涓绘祦锛屾晥鐜囬珮涓旀垚鏈綆銆侟/li>
  • 瓒呰杽鏅跺渾锛?lt;50 μm锛堻/strong>锛氶渶缁撳悎CMP+婀挎硶铓€鍒伙紝鎴栭噰鐢ㄤ綆搴斿姏鐮旂(锛圠ow-Stress CMP锛夋妧鏈€侟/li>
  • 绾崇背绾ц秴钖勶紙<10 μm锛堻/strong>锛氶渶绛夌瀛愪綋鍒昏殌鎴栨縺鍏夎緟鍔╁噺钖勶紙濡侰O鈧傛縺鍏夊墺绂伙級銆侟/li>

2. 鏉愭枡绫诲瀷

  • 纭呮櫠鍦咟/strong>锛欳MP鎴栨箍娉曡殌鍒伙紙HF/HNO鈧冩贩鍚堟恫锛夈€侟/li>
  • SOI鏅跺渾锛氶渶淇濇姢椤跺眰纭咃紝閲囩敤閫夋嫨鎬ц殌鍒伙紙濡俆MAH婧舵恫锛夈€侟/li>
  • III-V鏃忓寲鍚堢墿锛圙aAs銆丟aN锛堻/strong>锛氶伩鍏嶅寲瀛﹁厫铓€鎹熶激锛屼紭鍏堥€夋嫨婵€鍏夌儳铓€鎴栫瓑绂诲瓙浣撳埢铓€銆侟/li>

3. 琛ㄩ潰璐ㄩ噺闇€姹侟/strong>

  • 楂樺钩鏁村害锛堝MEMS浼犳劅鍣級锛氭箍娉曡殌鍒伙紙KOH婧舵恫锛夋垨绛夌瀛愪綋鍒昏殌锛圧IE锛夈€侟/li>
  • 浣庣己闄风巼锛堝鍔熺巼鍣ㄤ欢锛堻/strong>锛欳MP鍚庡鍔犻€€鐏伐鑹轰慨澶嶆櫠鏍兼崯浼ゃ€侟/li>

4. 鐢熶骇鏁堢巼涓庢垚鏈?/strong>

  • 閲忎骇鍦烘櫙锛欳MP鏁堢巼楂橈紙鍗曟満姣忓皬鏃跺鐞?0-100鐗囷級锛岄€傚悎澶ф壒閲忕敓浜с€侟/li>
  • 鐮斿彂/灏忔壒閲廃/strong>锛氬共娉曞埢铓€鎴栨縺鍏夊噺钖勭伒娲伙紝浣嗘垚鏈緝楂樸€侟/li>

涓夈€佸厛杩涘噺钖勬妧鏈強浼樺寲鏂瑰悜

1. 浣庡簲鍔汣MP宸ヨ壓

  • 宸ヨ壓鏀硅繘锛氫娇鐢ㄧ撼绫抽噾鍒氱煶纾ㄦ枡锛堢矑寰?0-100 nm锛夐檷浣庢満姊版崯浼ゃ€侟/li>
  • 鍙傛暟浼樺寲锛氱爺纾ㄥ帇鍔?lt;3 psi锛岃浆閫?0-40 rpm锛屽噺灏戣〃闈㈠井瑁傜汗銆侟/li>

2. 娣峰悎鍑忚杽鎶€鏈?/strong>

  • 姝ラ锛氱矖纾紙CMP鍘婚櫎80%鍘氬害锛?rarr; 绮炬姏锛堟哀鍖栭搱鎶涘厜娑诧級→ 婀挎硶铓€鍒伙紙HF:HNO鈧傹1:3锛変慨澶嶈〃闈€侟/li>
  • 鏁堟灉锛氭€诲帤搴︽尝鍔?lt;±0.5 μm锛岃〃闈㈢矖绯欏害Ra<0.1 nm銆侟/li>

3. 骞叉硶绛夌瀛愪綋鍑忚杽

  • 宸ヨ壓锛歋F鈧?O鈧傜瓑绂诲瓙浣撳埢铓€锛岀粨鍚圚Br杈呭姪鍚勫悜寮傛€ц厫铓€銆侟/li>
  • 浼樺娍锛氭棤鏈烘搴斿姏锛岄€傜敤浜嶵SV閫氬瓟鑳岄潰鍑忚杽锛堟繁搴︾簿搴?plusmn;1 μm锛夈€侟/li>

4. 婵€鍏夎瀵艰儗鍚戝墺绂伙紙Laser Lift-Off, LLO锛堻/strong>

  • 鍘熺悊锛氶€氳繃绱婵€鍏夛紙355 nm锛夎剦鍐插墺绂昏儗闈㈣杽鑶滐紙濡侴aN-on-SiC锛夈€侟/li>
  • 搴旂敤锛欼II-V鏃忓寲鍚堢墿鍗婂浣撱€丮icro-LED鑺墖銆侟/li>

鍥涖€佸叧閿川閲忔帶鍒剁偣

  1. 鍘氬害鍧囧寑鎬?/strong>锛
    • 浣跨敤妞亸浠垨婵€鍏夊共娑変华鍦ㄧ嚎鐩戞祴锛岀‘淇濆帤搴﹀亸宸?lt;±1%銆侟/li>
  2. 琛ㄩ潰缂洪櫡鎺у埗
    • SEM妫€鏌ラ绮掓薄鏌擄紙<0.1 μm棰楃矑瀵嗗害<1涓?cm²锛夈€侟/li>
  3. 娈嬩綑搴斿姏妫€娴婞/strong>锛
    • X灏勭嚎琛嶅皠锛圶RD锛夋祴閲忔櫠鏍肩暩鍙橈紝鐩爣搴斿姏<10 MPa銆侟/li>
  4. 杈圭紭淇濇姢
    • 鏈烘鎸℃澘鎴栧厜鍒昏兌閬斀锛岄伩鍏嶈竟缂樺穿杈癸紙<5 μm锛夈€侟/li>

浜斻€佸吀鍨嬪簲鐢ㄥ満鏅笌鎺ㄨ崘鏂规硶

鍦烘櫙 鎺ㄨ崘鎶€鏈?/strong> 鍙傛暟绀轰緥
鍔熺巼鍣ㄤ欢锛圛GBT锛堻/td> CMP+閫€鐏?/td> CMP閫熺巼10 μm/min锛岄€€鐏俯搴?50°C
MEMS鍔犻€熷害璁狘/td> KOH婀挎硶铓€鍒狐/td> 铓€鍒婚€熺巼2 μm/min锛屾俯搴?0°C
3D灏佽TSV閫氬瓟 RIE骞叉硶鍒昏殌 鍒昏殌娣卞害50 μm锛岄€夋嫨鎬?gt;100:1
GaN-on-SiC LED 婵€鍏夊墺绂伙紙LLO锛堻/td> 娉㈤暱355 nm锛岃剦鍐茶兘閲?0 μJ

鍏€佹湭鏉ヨ秼鍔军/strong>

  1. 鏅鸿兘鍖栨帶鍒迭/strong>锛欰I绠楁硶瀹炴椂璋冩暣鐮旂(鍙傛暟锛堝鍘嬪姏銆佽浆閫燂級锛屾彁鍗囧潎鍖€鎬с€侟/li>
  2. 鐜繚宸ヨ壓锛氬紑鍙戞棤閰?纰辫殌鍒绘恫锛堝H鈧侽鈧?HF浣撶郴锛夈€侟/li>
  3. 瓒呰杽灏佽闆嗘垚锛氱粨鍚堜复鏃堕敭鍚堬紙Tape BONDing锛夋妧鏈疄鐜板崟鐗囨櫠鍦嗙骇鍑忚杽銆侟/li>

鎬荤粨

鏅跺渾鑳岄潰鍑忚杽鐨?ldquo;鏈€浣虫柟娉?rdquo;闇€鏍规嵁鍏蜂綋闇€姹傚姩鎬侀€夋嫨锛欬/p>

  • 閲忎骇甯歌鍑忚杽锛氫紭鍏堥€夋嫨鏈烘鍖栧鎶涘厜锛圕MP锛堻/strong>銆侟/li>
  • 瓒呰杽/楂樼簿搴﹂渶姹侟/strong>锛氶噰鐢?strong>CMP+婀挎硶铓€鍒荤粍鍚堝伐鑹裹/strong>鎴朁strong>绛夌瀛愪綋骞叉硶鍒昏殌銆侟/li>
  • 鐗规畩鏉愭枡锛堝GaN锛堻/strong>锛氭帹鑽忺strong>婵€鍏夌儳铓€鎴朁strong>浣庢崯浼IE銆侟br /> 鏈€缁堥渶閫氳繃DOE瀹為獙浼樺寲鍙傛暟锛屽苟閰嶅悎鍦ㄧ嚎妫€娴嬬‘淇濊壇鐜囥€侟/li>
浜у搧鍜ㄨ
浠ュ鎴锋湇鍔′负涓績锛屾偍鐨勯渶姹傚氨鏄垜浠湇鍔$殑鏂瑰悜锛屾湡寰呬笌鎮ㄥ缓绔嬭仈绯伙紒
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