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class="tsemid-news-detial-content"> <div class="tsemid-news-detial-top"> <div class="tsemid-news-detial-top-left"> <div class="data-1 font14 ">2025.08.04</div> <div class="class-1 font20 ">琛屼笟璧勮</div> </div> <div class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">纰冲寲纭呭寲瀛︽満姊版姏鍏夋妧鏈畝浠婞/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px"> 纰冲寲纭咃紙SiC锛変綔涓虹涓変唬鍗婂浣撴潗鏂欑殑浠ｈ〃锛屽洜鍏跺绂佸甫銆侀珮鍑荤┛鐢靛満銆侀珮鐑鐜囩瓑浼樺紓鎬ц兘锛屽湪鐢靛姏鐢靛瓙銆佸皠棰戝櫒浠躲€佸厜鐢靛櫒浠剁瓑棰嗗煙灞曠幇鍑哄法澶ф綔鍔涖€傜劧鑰岋紝纰冲寲纭呮櫠浣撴瀬楂樼殑纭害鍜屽寲瀛︽儼鎬э紝浣垮叾鍔犲伐闅惧害杩滈珮浜庝紶缁熺鏉愭枡锛屽挨鍏舵槸琛ㄩ潰鎶涘厜鐜妭鐩存帴鍐冲畾浜嗗櫒浠剁殑鎬ц兘鍜屽彲闈犳€с€傚寲瀛︽満姊版姏鍏夛紙Chemical Mechanical Polishing, CMP锛夋妧鏈€氳繃鍖栧鑵愯殌涓庢満姊扮爺纾ㄧ殑鍗忓悓浣滅敤锛屾垚涓哄疄鐜扮⒊鍖栫瓒呭厜婊戙€佷綆鎹熶激琛ㄩ潰鍔犲伐鐨勫叧閿伐鑹恒€傛湰鏂囧皢绯荤粺浠嬬粛纰冲寲纭匔MP鎶€鏈殑鍘熺悊銆佹牳蹇冭绱犮€佹渶鏂拌繘灞曞強鏈潵鎸戞垬銆侟/span></p> <p><span style="font-size:16px"> 涓€銆佺⒊鍖栫CMP鎶€鏈殑鍩烘湰鍘熺悊<br /> CMP鎶€鏈槸涓€绉嶈〃闈㈠叏灞€骞冲潶鍖栨柟娉曪紝鍏舵牳蹇冨湪浜庡寲瀛﹁厫铓€涓庢満姊板幓闄ょ殑鍔ㄦ€佸钩琛°€傚浜庣⒊鍖栫鑰岃█锛屾姏鍏夋恫涓哀鍖栧墏锛堝H鈧侽鈧傘€丗e³鈦虹瓑锛夐鍏堜笌琛ㄩ潰鍙戠敓姘у寲鍙嶅簲锛岀敓鎴愯川鍦拌緝杞殑SiO鈧傛垨閲戝睘纭呴吀鐩愬眰锛涢殢鍚庢姏鍏夊灚涓庣（鏂欙紙濡傜撼绫崇骇浜屾哀鍖栫銆侀噾鍒氱煶锛夐€氳繃鏈烘鎽╂摝浣滅敤鍘婚櫎杞寲灞傘€傝繖涓€杩囩▼涓紝鍖栧鑵愯殌闄嶄綆浜嗘潗鏂欑殑鏈烘寮哄害锛岃€屾満姊颁綔鐢ㄥ姞閫熶簡鍙嶅簲浜х墿鐨勫墺绂伙紝浜岃€呭崗鍚屽疄鐜伴珮鏁堟潗鏂欏幓闄ゃ€傜爺绌惰〃鏄庯紝4HSiC鐨凜MP鍘婚櫎鐜囧彲杈?.52 μm/h锛岃〃闈㈢矖绯欏害鍙帶鍒跺湪0.1 nm浠ヤ笅锛圧MS鍊硷級锛屾弧瓒冲姛鐜囧櫒浠跺琛簳琛ㄩ潰璐ㄩ噺鐨勮姹傘€侟/span></p> <p><span style="font-size:16px"> 浜屻€佺⒊鍖栫CMP鐨勬牳蹇冩妧鏈绱燑br /> 1. 鎶涘厜娑查厤鏂硅璁狘br /> <a href="/">纰冲寲纭匔MP鎶涘厜</a>娑查渶鍏奸【姘у寲鑳藉姏涓庤兌浣撶ǔ瀹氭€с€備富娴佷綋绯诲寘鎷細<br /> 纰辨€т綋绯伙紙pH 1012锛夛細閲囩敤KOH鎴栬兒绫昏皟鑺俻H锛岄厤鍚圚鈧侽鈧傛哀鍖栵紝鍙舰鎴愭槗鍘婚櫎鐨凷iOSi閿紝浣嗗璁惧鑵愯殌鎬у己锛汓br /> 閰告€т綋绯伙紙pH 24锛夛細浠e(NO鈧?鈧冩垨Cr鈧侽鈧冧负鍌寲鍓傦紝閫氳繃Fenton鍙嶅簲浜х敓娲绘€ф哀锛屾哀鍖栨晥鐜囬珮浣嗘槗寮曞叆閲戝睘姹℃煋锛汓br /> 澶嶅悎姘у寲浣撶郴锛氬H鈧侽鈧備笌KMnO鈧勮仈鐢紝鍦ㄨ繎涓€H涓嬪疄鐜伴珮閫夋嫨姣旓紙SiC/SiO鈧傦紴100:1锛夈€侟/span></p> <p><span style="font-size:16px">2. 纾ㄦ枡閫夋嫨涓庝紭鍖朁br /> 浼犵粺SiO鈧傜（鏂欏洜纭害涓嶈冻锛堣帿姘忕‖搴?锛夊鑷存晥鐜囦綆涓嬶紝鑰岄噾鍒氱煶纾ㄦ枡锛堢‖搴?0锛夋槗浜х敓鍒掔棔銆傛渶鏂扮爺绌堕噰鐢ㄦ牳澹崇粨鏋勭（鏂欙紝濡侫l鈧侽鈧傽SiO鈧傦紙鑺儴涓虹‖璐ˋl鈧侽鈧冩彁鍗囧垏鍓婂姏锛屽澹充负SiO鈧傞檷浣庤〃闈㈡崯浼わ級锛屼娇鏉愭枡鍘婚櫎鐜囨彁鍗?0%鐨勫悓鏃跺皢琛ㄩ潰缂洪櫡瀵嗗害鎺у埗鍦紲0.5/cm²銆侟/span></p> <p><span style="font-size:16px">3. 宸ヨ壓鍙傛暟鎺у埗<br /> 鍘嬪姏锛氶€氬父淇濇寔2035 kPa锛岃繃楂樺帇鍔涗細寮曞彂浜氳〃闈㈣绾癸紱<br /> 杞€燂細鎶涘厜鐩樹笌杞藉叿杞€熷樊闇€浼樺寲鑷?0100 rpm浠ラ伩鍏嶆丁娴佹晥搴旓紱<br /> 娓╁害锛氱淮鎸佸湪4060鈩冨彲鍔犻€熸哀鍖栧弽搴旓紝浣嗛渶闃叉鎶涘厜娑叉垚鍒嗗垎瑙ｃ€侟/span></p> <p><span style="font-size:16px"> 涓夈€佹妧鏈寫鎴樹笌鍒涙柊瑙ｅ喅鏂规<br /> 1. 琛ㄩ潰/浜氳〃闈㈡崯浼ゆ帶鍒迭br /> 纰冲寲纭匔MP鍚庢槗鍑虹幇浣嶉敊灞傦紙娣卞害鍙揪50 nm锛夛紝褰卞搷鍣ㄤ欢鍑荤┛鐢靛帇銆備腑绉戦櫌鍥㈤槦寮€鍙戜簡"涓ゆ鎶涘厜娉?quot;锛氬厛閲囩敤鍚撼绫抽噾鍒氱煶鐨勭矖鎶涙恫蹇€熷幓闄わ紙Ra锛? nm锛夛紝鍐嶇敤鑳朵綋SiO鈧傜簿鎶涗慨澶嶆崯浼わ紝浣?鑻卞SiC琛簳鐨勫井绠″瘑搴﹂檷鑷筹紲0.1涓?cm²銆侟/span></p> <p><span style="font-size:16px">2. 閫夋嫨鎬ф姏鍏夐渶姹侟br /> 瀵逛簬SiConInsulator缁撴瀯锛岄渶瀹炵幇SiC涓庡簳灞係iO鈧傜殑楂橀€夋嫨姣斻€備笢浜伐涓氬ぇ瀛︽彁鍑虹殑鐢靛寲瀛︽満姊版姏鍏夛紙ECMP锛夋妧鏈紝閫氳繃鏂藉姞1.5V鍋忓帇浣縎iC琛ㄩ潰浼樺厛姘у寲锛岄€夋嫨姣旀彁鍗囪嚦200:1锛屽彴闃堕珮搴﹀樊鎺у埗鍦?plusmn;0.3 nm鍐呫€侟/span></p> <p><span style="font-size:16px">3. 鐜繚鍨嬪伐鑹哄紑鍙慄br /> 閽堝浼犵粺鎶涘厜娑插惈閲嶉噾灞炵殑闂锛屽箍涓滃伐涓氬ぇ瀛︾爺鍙戜簡浠ヨ繃纭吀閾典负姘у寲鍓傜殑缁胯壊閰嶆柟锛岄厤鍚堝彲闄嶈В铻悎鍓侲DDS锛屼娇COD鎺掓斁闄嶄綆70%锛屼笖鎶涘厜閫熺巼淇濇寔1.2 μm/h銆侟/span></p> <p><span style="font-size:16px"> 鍥涖€佸墠娌挎妧鏈姩鎬?br /> 1. 绛夌瀛愪綋杈呭姪CMP<br /> 鍖椾含澶у鍥㈤槦灏嗗ぇ姘斿帇绛夌瀛愪綋涓嶤MP鑰﹀悎锛屽埄鐢ㄧ瓑绂诲瓙浣撲骇鐢熺殑娲绘€ф哀鐗╃锛堝O鈧冦€?middot;OH锛夐姘у寲SiC琛ㄩ潰锛屼娇6HSiC鐨勫幓闄ょ巼鎻愬崌鑷?.8 μm/h锛岃〃闈㈢矖绯欏害杈?.07 nm锛圓FM娴嬮噺鑼冨洿10×10 μm²锛夈€侟/span></p> <p><span style="font-size:16px">2. 鏅鸿兘鍖栬繃绋嬬洃鎺?br /> 搴旂敤鍘熶綅鍏夎氨鎶€鏈紙濡傛媺鏇煎厜璋憋級瀹炴椂鐩戞祴琛ㄩ潰鍖栧鐘舵€侊紝缁撳悎鏈哄櫒瀛︿範绠楁硶鍔ㄦ€佽皟鑺俻H鍊煎拰姘у寲鍓傛祿搴︼紝娓呭崕澶у瀹炵幇鐨勯棴鐜帶鍒剁郴缁熶娇鎵规闂存姏鍏夊潎鍖€鎬у亸宸紲3%銆侟/span></p> <p><span style="font-size:16px">3. 瓒呯簿瀵嗘姏鍏夎澶嘃br /> 缇庡浗搴旂敤鏉愭枡鍏徃鎺ㄥ嚭鐨凪irra CMP绯荤粺閰嶅澶氬尯鍘嬪姏璋冭妭鎶涘厜澶达紝閽堝150mm SiC鏅跺渾鐨勯潪鍧囧寑鎬у彲鎺у埗鍦?%浠ュ唴锛岄厤鍚堝湪绾胯啘鍘氭祴閲忔ā鍧楋紝鍔犲伐鏁堢巼鎻愬崌30%銆侟/span></p> <p><span style="font-size:16px"> 浜斻€佹湭鏉ュ彂灞曟柟鍚慄br /> 闅忕潃8鑻卞SiC鏅跺渾閲忎骇闇€姹傝揩杩戯紝CMP鎶€鏈潰涓存洿澶ф寫鎴橈細鈶寮€鍙戦€傚簲澶у昂瀵告櫠鍦嗙殑鍧囪川鎶涘厜宸ヨ壓锛涒憽绐佺牬SiC涓嶨aN寮傝川闆嗘垚鐨勯€夋嫨鎬ф姏鍏夌摱棰堬紱鈶鎺㈢储骞插紡CMP銆佹縺鍏夎緟鍔〤MP绛夋柊鍘熺悊鎶€鏈€傛嵁Yole棰勬祴锛?027骞村叏鐞僑iC CMP鑰楁潗甯傚満瑙勬ā灏嗚揪8.7浜跨編鍏冿紝骞村鍚堝闀跨巼杈?2%锛屽叾涓腑鍥藉競鍦轰唤棰濇湁鏈涚獊鐮?5%銆侟/span></p> <p><span style="font-size:16px">纰冲寲纭匔MP鎶€鏈殑杩涙灏嗘寔缁帹鍔ㄥ绂佸甫鍗婂浣撲骇涓氱殑鍙戝睍銆備粠鏉愭枡绉戝瑙掑害鐪嬶紝鏂板瀷鍌寲姘у寲鏈哄埗鐨勫彂鐜般€佸師瀛愮骇琛ㄩ潰璋冩帶鎶€鏈殑绐佺牬锛屽皢杩涗竴姝ユ彁鍗囨姏鍏夎川閲忎笌鏁堢巼锛涗粠浜т笟搴旂敤缁村害锛屼笌澶栧欢鐢熼暱銆佸櫒浠跺埗閫犲伐鑹虹殑鍗忓悓浼樺寲锛屽皢鎴愪负涓嬩竴浠ｅ姛鐜囨ā鍧楁€ц兘鎻愬崌鐨勫叧閿敮鐐广€侟br /> ‌</span></p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index506.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">纰冲寲纭呮姏鍏夌殑鏂规硶鏈夊摢浜汓/div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index508.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> <div class="title-1 font16 clamp1">鍏ㄨ嚜鍔ㄥ噺钖勬満搴旂敤棰嗗煙</div> </a> </div> </div> </div> </div> <script src="/../static/js/jquery.share.min.js"></script> <div class="tsemid-contact-popup" id="from1" > <div class="tsemid-contact-popup-content"> <div class="close-1" ><a href="javascript:;"></a></div> <div class="tsemid-product-consultation" 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