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<div class="tsemid-news-detial-content"> <div class="tsemid-news-detial-top"> <div class="tsemid-news-detial-top-left"> <div class="data-1 font14 ">2025.08.01</div> <div class="class-1 font20 ">琛屼笟璧勮</div> </div> <div class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">纰冲寲纭呮姏鍏夌殑鏂规硶鏈夊摢浜汓/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px"> 纰冲寲纭咃紙SiC锛変綔涓轰竴绉嶉珮鎬ц兘鐨勭涓変唬鍗婂浣撴潗鏂欙紝鍥犲叾楂樼‖搴︺€侀珮鐑鐜囥€佽€愰珮娓╁拰鎶楄緪灏勭瓑浼樺紓鐗规€э紝琚箍娉涘簲鐢ㄤ簬鐢靛姏鐢靛瓙銆佸皠棰戦€氫俊銆佽埅绌鸿埅澶╃瓑棰嗗煙銆傜劧鑰岋紝纰冲寲纭呯殑楂樼‖搴﹀拰鍖栧鎯版€т篃浣垮叾鎶涘厜鍔犲伐闈复宸ㄥぇ鎸戞垬銆傜洰鍓嶏紝纰冲寲纭呮姏鍏夌殑鏂规硶涓昏鍖呮嫭鏈烘鎶涘厜銆佸寲瀛︽満姊版姏鍏夛紙CMP锛夈€佺數鍖栧鏈烘鎶涘厜锛圗CMP锛夈€佹縺鍏夋姏鍏夈€佺瓑绂诲瓙浣撴姏鍏夌瓑銆備互涓嬪皢璇︾粏浠嬬粛杩欎簺鏂规硶鐨勫師鐞嗐€佺壒鐐瑰強搴旂敤銆侟/span></p> <p><span style="font-size:16px"> 1. 鏈烘鎶涘厜<br /> 鏈烘鎶涘厜鏄紶缁熺殑鎶涘厜鏂规硶锛屼富瑕侀€氳繃纾ㄦ枡涓庡伐浠惰〃闈㈢殑鏈烘浣滅敤鍘婚櫎鏉愭枡銆傚浜庣⒊鍖栫杩欑楂樼‖搴︽潗鏂欙紝閫氬父浣跨敤閲戝垰鐭崇（鏂欐垨绔嬫柟姘寲纭硷紙CBN锛夌（鏂欒繘琛屾姏鍏夈€傛満姊版姏鍏夌殑浼樼偣鏄澶囩畝鍗曘€佹垚鏈綆锛岄€傚悎澶ф壒閲忕敓浜с€傜劧鑰岋紝鏈烘鎶涘厜瀹规槗鍦ㄨ〃闈骇鐢熷垝鐥曞拰浜氳〃闈㈡崯浼わ紝褰卞搷鍣ㄤ欢鐨勬€ц兘鍜屽彲闈犳€с€侟/span></p> <p><span style="font-size:16px">涓轰簡鎻愰珮鏈烘鎶涘厜鐨勬晥鏋滐紝鐮旂┒浜哄憳寮€鍙戜簡澶氭鎶涘厜宸ヨ壓銆備緥濡傦紝鍏堜娇鐢ㄧ矖棰楃矑閲戝垰鐭崇（鏂欒繘琛岀矖鎶涳紝鍘婚櫎澶ч儴鍒嗘潗鏂欙紱鐒跺悗浣跨敤缁嗛绮掗噾鍒氱煶纾ㄦ枡杩涜绮炬姏锛屽噺灏戣〃闈㈢矖绯欏害銆傛澶栵紝杩樺彲浠ョ粨鍚堣秴澹版尟鍔ㄨ緟鍔╂姏鍏夛紝鍒╃敤瓒呭０绌哄寲鏁堝簲鍜屽啿鍑讳綔鐢紝鎻愰珮鎶涘厜鏁堢巼鍜岃〃闈㈣川閲忋€侟/span></p> <p><span style="font-size:16px"> 2. <a href="/">鍖栧鏈烘鎶涘厜</a>锛圕MP锛堻br /> 鍖栧鏈烘鎶涘厜锛圕MP锛夋槸鐩墠纰冲寲纭呮姏鍏夌殑涓绘祦鏂规硶锛屽畠缁撳悎浜嗗寲瀛﹁厫铓€鍜屾満姊扮（鍓婄殑浣滅敤銆傚湪CMP杩囩▼涓紝鎶涘厜娑蹭腑鐨勬哀鍖栧墏锛堝H2O2銆並MnO4绛夛級涓庣⒊鍖栫琛ㄩ潰鍙戠敓鍖栧鍙嶅簲锛岀敓鎴愪竴灞傝緝杞殑姘у寲灞傦紙濡係iO2锛夛紝鐒跺悗閫氳繃鏈烘浣滅敤鍘婚櫎姘у寲灞傦紝瀹炵幇琛ㄩ潰骞冲潶鍖栥€侟/span></p> <p><span style="font-size:16px">CMP鐨勪紭鐐规槸鑳藉鑾峰緱鏋侀珮鐨勮〃闈㈠钩鏁村害鍜屼綆绮楃硻搴︼紙Ra < 0.5 nm锛夛紝閫傜敤浜庣⒊鍖栫琛簳鍜屽寤剁墖鐨勬姏鍏夈€傜劧鑰岋紝CMP鐨勬姏鍏夋晥鐜囪緝浣庯紝涓旀姏鍏夋恫鐨勯厤鍒跺拰搴熸恫澶勭悊鎴愭湰杈冮珮銆傝繎骞存潵锛岀爺绌朵汉鍛橀€氳繃浼樺寲鎶涘厜娑叉垚鍒嗭紙濡傛坊鍔犵撼绫崇（鏂欍€佸偓鍖栧墏绛夛級鍜屽伐鑹哄弬鏁帮紙濡傚帇鍔涖€佽浆閫熺瓑锛夛紝杩涗竴姝ユ彁楂楥MP鐨勬晥鐜囧拰琛ㄩ潰璐ㄩ噺銆侟/span></p> <p><span style="font-size:16px"> 3. 鐢靛寲瀛︽満姊版姏鍏夛紙ECMP锛堻br /> 鐢靛寲瀛︽満姊版姏鍏夛紙ECMP锛夋槸鍦–MP鍩虹涓婂彂灞曡捣鏉ョ殑涓€绉嶆柊鍨嬫姏鍏夋柟娉曘€傚畠閫氳繃鍦ㄦ姏鍏夎繃绋嬩腑鏂藉姞鐢靛満锛屽姞閫熺⒊鍖栫琛ㄩ潰鐨勭數鍖栧鍙嶅簲锛屼粠鑰岄檷浣庢満姊扮（鍓婄殑闅惧害銆侲CMP鐨勪紭鐐规槸鎶涘厜鏁堢巼楂樸€佽〃闈㈡崯浼ゅ皬锛屽挨鍏堕€傜敤浜庣⒊鍖栫鍔熺巼鍣ㄤ欢鐨勫姞宸ャ€侟/span></p> <p><span style="font-size:16px">鍦‥CMP杩囩▼涓紝纰冲寲纭呭伐浠朵綔涓洪槼鏋侊紝鎶涘厜娑蹭腑鐨勭數瑙ｈ川锛堝NaOH銆並OH绛夛級鍦ㄧ數鍦轰綔鐢ㄤ笅涓庣⒊鍖栫琛ㄩ潰鍙戠敓姘у寲鍙嶅簲锛岀敓鎴愭槗浜庡幓闄ょ殑姘у寲灞傘€傚悓鏃讹紝鏈烘纾ㄥ墛浣滅敤鍘婚櫎姘у寲灞傦紝瀹炵幇琛ㄩ潰骞冲潶鍖栥€侲CMP鐨勫叧閿湪浜庢帶鍒剁數鍦哄己搴﹀拰鎶涘厜娑茬殑鍖栧鎬ц川锛屼互閬垮厤杩囧害鑵愯殌鎴栨満姊版崯浼ゃ€侟/span></p> <p><span style="font-size:16px"> 4. 婵€鍏夋姏鍏堻br /> 婵€鍏夋姏鍏夋槸涓€绉嶉潪鎺ヨЕ寮忔姏鍏夋柟娉曪紝鍒╃敤楂樿兘婵€鍏夋潫鐓у皠纰冲寲纭呰〃闈紝閫氳繃鐔斿寲鍜岃捀鍙戜綔鐢ㄥ幓闄よ〃闈㈡潗鏂欍€傛縺鍏夋姏鍏夌殑浼樼偣鏄簿搴﹂珮銆佹棤宸ュ叿纾ㄦ崯锛岄€傜敤浜庡鏉傚舰鐘跺拰寰皬鍖哄煙鐨勬姏鍏夈€傜劧鑰岋紝婵€鍏夋姏鍏夊鏄撳湪琛ㄩ潰浜х敓鐑奖鍝嶅尯锛圚AZ锛夊拰寰绾癸紝褰卞搷鍣ㄤ欢鐨勭數瀛︽€ц兘銆侟/span></p> <p><span style="font-size:16px">涓轰簡鍑忓皯鐑崯浼わ紝鐮旂┒浜哄憳寮€鍙戜簡瓒呯煭鑴夊啿婵€鍏夛紙濡傞绉掓縺鍏夈€佺毊绉掓縺鍏夛級鎶涘厜鎶€鏈€傝秴鐭剦鍐叉縺鍏夌殑鑳介噺闆嗕腑鍦ㄦ瀬鐭椂闂村唴閲婃斁锛屽彲浠ユ樉钁楅檷浣庣儹褰卞搷鍖虹殑娣卞害銆傛澶栵紝杩樺彲浠ョ粨鍚堟皵浣撹緟鍔╋紙濡傛儼鎬ф皵浣撴垨鍙嶅簲姘斾綋锛夋縺鍏夋姏鍏夛紝杩涗竴姝ユ敼鍠勮〃闈㈣川閲忋€侟/span></p> <p><span style="font-size:16px"> 5. 绛夌瀛愪綋鎶涘厜<br /> 绛夌瀛愪綋鎶涘厜鏄竴绉嶅熀浜庣瓑绂诲瓙浣撳寲瀛﹀弽搴旂殑鎶涘厜鏂规硶銆傚湪绛夌瀛愪綋鎶涘厜杩囩▼涓紝楂樻椿鎬х瓑绂诲瓙浣擄紙濡侰F4銆丱2绛夛級涓庣⒊鍖栫琛ㄩ潰鍙戠敓鍖栧鍙嶅簲锛岀敓鎴愭尌鍙戞€т骇鐗╋紙濡係iF4銆丆O2绛夛級锛屼粠鑰屽疄鐜版潗鏂欏幓闄ゃ€傜瓑绂诲瓙浣撴姏鍏夌殑浼樼偣鏄棤鏈烘搴斿姏銆佽〃闈㈡崯浼ゅ皬锛岄€傚悎瓒呯簿瀵嗘姏鍏夈€侟/span></p> <p><span style="font-size:16px">绛夌瀛愪綋鎶涘厜鐨勫叧閿湪浜庢帶鍒剁瓑绂诲瓙浣撶殑鑳介噺鍜屽寲瀛﹀弽搴旈€熺巼銆備緥濡傦紝鍙互閫氳繃璋冭妭姘斾綋鎴愬垎銆佹皵鍘嬨€佸姛鐜囩瓑鍙傛暟锛屼紭鍖栨姏鍏夋晥鏋溿€傛澶栵紝杩樺彲浠ョ粨鍚堢瀛愭潫杈呭姪鎶涘厜锛岃繘涓€姝ユ彁楂樿〃闈㈠钩鏁村害銆侟/span></p> <p><span style="font-size:16px"> 6. 鍏朵粬鎶涘厜鏂规硶<br /> 闄や簡涓婅堪鏂规硶澶栵紝杩樻湁涓€浜涙柊鍏寸殑纰冲寲纭呮姏鍏夋妧鏈鍦ㄧ爺绌朵腑锛屼緥濡傦細<br /> 纾佹祦鍙樻姏鍏夛紙MRP锛夛細鍒╃敤纾佹祦鍙樻恫鍦ㄧ鍦轰綔鐢ㄤ笅鐨勬祦鍙樼壒鎬э紝瀹炵幇鏌旀€ф姏鍏夛紝閫傜敤浜庡鏉傛洸闈㈠拰鍏夊鍏冧欢鐨勫姞宸ャ€侟br /> 鐢垫吵鎶涘厜锛圗PP锛夛細閫氳繃鐢靛満椹卞姩绾崇背棰楃矑鍦ㄥ伐浠惰〃闈㈣繍鍔紝瀹炵幇绾崇背绾ф姏鍏夈€侟br /> 鍖栧姘旂浉鎶涘厜锛圕VP锛夛細鍒╃敤姘旂浉鍖栧鍙嶅簲鍘婚櫎琛ㄩ潰鏉愭枡锛岄€傜敤浜庨珮绮惧害鍣ㄤ欢鐨勫姞宸ャ€侟/span></p> <p><span style="font-size:16px"> 7. 鎶涘厜鏂规硶鐨勯€夋嫨涓庡簲鐢?br /> 涓嶅悓鐨勭⒊鍖栫鎶涘厜鏂规硶鍚勬湁浼樼己鐐癸紝瀹為檯搴旂敤涓渶瑕佹牴鎹叿浣撻渶姹傞€夋嫨鍚堥€傜殑鏂规硶銆備緥濡傦細<br /> 琛簳鎶涘厜锛氶€氬父閲囩敤CMP鎴朎CMP锛屼互鑾峰緱瓒呭钩鏁磋〃闈€侟br /> 鍔熺巼鍣ㄤ欢鎶涘厜锛氬彲閲囩敤婵€鍏夋姏鍏夋垨绛夌瀛愪綋鎶涘厜锛屼互鍑忓皯琛ㄩ潰鎹熶激銆侟br /> 鍏夊鍏冧欢鎶涘厜锛氬彲閲囩敤纾佹祦鍙樻姏鍏夛紝浠ュ疄鐜板鏉傛洸闈㈢殑楂樼簿搴﹀姞宸ャ€侟/span></p> <p><span style="font-size:16px"> 8. 鏈潵鍙戝睍瓒嬪娍<br /> 闅忕潃纰冲寲纭呭櫒浠跺悜楂樻€ц兘銆侀泦鎴愬寲鏂瑰悜鍙戝睍锛屽鎶涘厜鎶€鏈殑瑕佹眰涔熻秺鏉ヨ秺楂樸€傛湭鏉ョ殑鐮旂┒鏂瑰悜鍖呮嫭锛欬br /> 缁胯壊鎶涘厜鎶€鏈細寮€鍙戠幆淇濆瀷鎶涘厜娑插拰浣庤兘鑰楁姏鍏夊伐鑹猴紝鍑忓皯鐜姹℃煋銆侟br /> 鏅鸿兘鍖栨姏鍏夛細缁撳悎浜哄伐鏅鸿兘鍜屽ぇ鏁版嵁鎶€鏈紝瀹炵幇鎶涘厜杩囩▼鐨勫疄鏃剁洃鎺у拰浼樺寲銆侟br /> 澶嶅悎鎶涘厜鎶€鏈細灏嗗绉嶆姏鍏夋柟娉曠粨鍚堬紝鍙戞尌鍚勮嚜浼樺娍锛屾彁楂樻姏鍏夋晥鐜囧拰璐ㄩ噺銆侟/span></p> <p><span style="font-size:16px">鎬讳箣锛孅a href="/">纰冲寲纭呮姏鍏堻/a>鎶€鏈殑鍙戝睍灏嗕负鍏跺湪鍗婂浣撱€佺數鍔涚數瀛愮瓑棰嗗煙鐨勫簲鐢ㄦ彁渚涙洿寮烘湁鍔涚殑鏀拺銆侟br /> ‌</span></p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index505.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">鏅跺渾鍑忚杽鐨勬妧鏈紭鍔军/div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index507.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> <div class="title-1 font16 clamp1">纰冲寲纭呭寲瀛︽満姊版姏鍏夋妧鏈畝浠婞/div> </a> </div> </div> </div> </div> <script src="/../static/js/jquery.share.min.js"></script> <div class="tsemid-contact-popup" id="from1" > <div class="tsemid-contact-popup-content"> <div class="close-1" ><a href="javascript:;"></a></div> <div class="tsemid-product-consultation" id="fromlist"> <div class="title-1 font30" 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