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.mheader-nav ul li a.nav i::before {transform: translate(-50%,-50%) rotate(90deg);} .mheader-nav ul li a.nav.cur i::before {display: none;} .mheader-nav-show{padding-bottom: 2rem;overflow: hidden;display: none;} .mheader-nav-show a{display: block;padding: .5rem 2rem;position: relative;} .mheader-nav-show a::before {content: '';width: 4px;height: 4px;background: #ccc;top: 50%;transform: translateY(-50%);position: absolute;left: 0;} @media screen and (max-width: 860px) {.mheader-nav {display: block;}} </style> <script type="text/javascript" > $('.mheader-nav .xiala ').on('click', function(event){ event.preventDefault(); $(this).toggleClass("cur"); $(this).next('.mheader-nav-show').slideToggle(); }); </script> <div class="tsemid-news-detial"> <div class="tsemid-news-detial-content"> <div class="tsemid-news-detial-top"> <div class="tsemid-news-detial-top-left"> <div class="data-1 font14 ">2025.06.16</div> <div class="class-1 font20 ">琛屼笟璧勮</div> </div> <div class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">CMP璁惧鎬ц兘璇勪环鏍囧噯</div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px">鍦ㄥ崐瀵间綋鍒堕€犻鍩燂紝鍖栧鏈烘鎶涘厜锛圕MP锛夎澶囦綔涓烘櫠鍦嗚〃闈㈠钩鍧﹀寲鐨勬牳蹇冭澶囷紝鍏舵€ц兘鐩存帴鍐冲畾浜嗚姱鐗囩殑鑹巼鍜屽彲闈犳€с€傞殢鐫€鍒剁▼鑺傜偣涓嶆柇鍚?nm銆?nm鐢氳嚦鏇村厛杩涘伐鑹烘帹杩涳紝CMP璁惧鐨勮瘎浠锋爣鍑嗗凡浠庡崟涓€鍘婚櫎閫熺巼鎸囨爣鍙戝睍涓烘兜鐩栧伐鑹虹簿搴︺€佺ǔ瀹氭€с€佹櫤鑳藉寲姘村钩绛夌淮搴︾殑缁煎悎浣撶郴銆傛湰鏂囧皢浠庢妧鏈弬鏁般€佸伐鑹洪€傞厤鎬с€佺敓浜ф晥鑳藉強琛屼笟鍙戝睍瓒嬪娍鍥涗釜灞傞潰锛岀郴缁熻В鏋怌MP璁惧鐨勬€ц兘璇勪环鏍囧噯銆侟/span></p> <p><span style="font-size:16px"> 涓€銆佹牳蹇冩妧鏈弬鏁帮細绮惧害涓庣ǔ瀹氭€х殑閲忓寲鎸囨爣<br /> 1. 鍘婚櫎閫熺巼锛圧R锛変笌鍧囧寑鎬?br /> 涓绘祦300mm鏅跺渾鐨勫幓闄ら€熺巼闇€绋冲畾鍦?00800nm/min鍖洪棿锛屽悓鏃惰姹傜墖鍐呬笉鍧囧寑鎬э紙WIWNU锛?le;3%锛岀墖闂翠笉鍧囧寑鎬э紙WTWNU锛?le;5%銆備緥濡傚湪浜屾哀鍖栫鎶涘厜涓紝涓滀含绮惧瘑锛圓CCRETECH锛夌殑璁惧閫氳繃闂幆鍘嬪姏鎺у埗绯荤粺锛屽彲瀹炵幇±1%鐨勯€熺巼娉㈠姩鎺у埗銆侟/span></p> <p><span style="font-size:16px">2. 琛ㄩ潰缂洪櫡鎺у埗<br /> 14nm浠ヤ笅鑺傜偣瑕佹眰姣忕墖鏅跺渾寰垝鐥曪紙Microscratch锛?le;3涓紝棰楃矑姹℃煋锛圥article锛?le;0.1涓?cm²銆傚簲鐢ㄦ潗鏂欙紙AMAT锛夌殑Reflexion绯诲垪閲囩敤澶氬尯鑷€傚簲鍘嬪姏璋冭妭鎶€鏈紝灏嗙己闄风巼闄嶄綆鑷充紶缁熻澶囩殑1/5銆侟/span></p> <p><span style="font-size:16px">3. 骞冲潶鍖栬兘鍔汓br /> 瀵逛簬3D NAND瀛樺偍鍣ㄧ殑楂樻繁瀹芥瘮缁撴瀯锛屽彴闃堕珮搴﹀樊锛圫tep Height锛夐渶浠庡垵濮?00nm闄嶈嚦锛?nm锛岃姹傝澶囧叿澶囦簹绾崇背绾у疄鏃惰啘鍘氱洃娴嬭兘鍔涖€傝崗鍘熸満姊帮紙EBARA锛夌殑EQpolisher閫氳繃闆嗘垚鍏夊骞叉秹浠紝瀹炵幇±0.3nm鐨勫帤搴︽帶鍒剁簿搴︺€侟/span></p> <p><span style="font-size:16px"> 浜屻€佸伐鑹洪€傞厤鎬э細澶氬満鏅簲鐢ㄨ兘鍔涜瘎浼?br /> 1. 鏉愭枡鍏煎浣撶郴<br /> 鐜颁唬CMP璁惧闇€鍚屾椂鏀寔閾滀簰杩烇紙Cu锛夈€侀挻锛圕o锛夈€侀拰锛圧u锛夌瓑鏂板瀷浜掕繛鏉愭枡锛屼互鍙婁綆k浠嬭川銆佹爱鍖栫绛夎剢寮辨潗鏂欑殑鎶涘厜銆侺am Research鐨凷abre绯诲垪閫氳繃妯″潡鍖栬璁★紝鍙湪鍚屼竴骞冲彴瀹炵幇浠庨噾灞炲埌浠嬭川鐨勫叏娴佺▼鍔犲伐銆侟/span></p> <p><span style="font-size:16px">2. 閰嶆柟鍒囨崲鏁堢巼<br /> 鍦‵oundry鍘傜殑娣峰悎鐢熶骇妯″紡涓嬶紝璁惧闇€鍦?5鍒嗛挓鍐呭畬鎴愭姏鍏夊灚/鐮旂（娑插垏鎹€侫SMPT鐨凬eoPol绯诲垪閲囩敤棰勮寮忚€楁潗鐩掕璁★紝灏嗛厤鏂瑰垏鎹㈡椂闂寸缉鐭嚦8鍒嗛挓锛屾彁鍗囪澶囧埄鐢ㄧ巼12%銆侟/span></p> <p><span style="font-size:16px">3. 鐗规畩缁撴瀯澶勭悊<br /> 閽堝GAA鏅朵綋绠′腑鐨勭撼绫崇墖缁撴瀯锛岃姹傞€夋嫨姣旓紙Selectivity锛夋帶鍒跺湪1:50浠ヤ笂銆俆EL鐨凪2000绯诲垪閫氳繃pH鍊煎姩鎬佽皟鑺傛妧鏈紝瀹炵幇浜嗙涓庢哀鍖栫鐨勭簿纭€夋嫨鎬у幓闄ゃ€侟/span></p> <p><span style="font-size:16px"> 涓夈€佺敓浜ф晥鑳斤細鎴愭湰涓庢櫤鑳藉寲鐨勫钩琛狘br /> 1. 鑰楁潗鍒╃敤鐜嘃br /> 鍏堣繘璁惧灏嗘姏鍏夊灚瀵垮懡寤堕暱鑷?00800鐗?娆★紝鐮旂（娑叉秷鑰楅噺闄嶈嚦0.3ml/cm²銆傚浗浜т腑鐢电45鎵€璁惧閫氳繃鍨潰婵€鍏変慨鏁存妧鏈紝浣胯€楁潗鎴愭湰闄嶄綆40%銆侟/span></p> <p><span style="font-size:16px">2. 鏅鸿兘鍖栨按骞颤br /> 閰嶅AI绠楁硶鐨勮澶囧彲瀹炵幇锛欬br /> 鍩轰簬鍘嗗彶鏁版嵁鐨勬姏鍏夌粓鐐归娴嬶紙鍑嗙‘鐜囷紴95%锛堻br /> 瀹炴椂宸ヨ壓鍙傛暟鍔ㄦ€佽ˉ鍋匡紙鍝嶅簲鏃堕棿锛?0ms锛堻br /> 棰勬祴鎬х淮鎶わ紙鏁呴殰棰勮鎻愬墠4灏忔椂浠ヤ笂锛堻br /> 濡侹LA鐨凷urfscan绯荤粺宸插疄鐜板叏鑷姩缂洪櫡鍒嗙被涓庢牴婧愬垎鏋愩€侟/span></p> <p><span style="font-size:16px">3. 鍗曚綅浜ц兘鎴愭湰<br /> 鎸?00mm鏅跺渾璁＄畻锛岃涓氭爣鏉嗚澶囩殑CPP锛圕ost Per Pass锛夊凡鎺у埗鍦?2535鍖洪棿锛屽浗浜ц澶囨閫氳繃鏈湡鍖栦緵搴旈摼灏嗘垚鏈帇缂╄嚦$1822銆侟/span></p> <p><span style="font-size:16px"> 鍥涖€佸墠娌垮彂灞曡秼鍔匡細涓嬩竴浠ｆ妧鏈偍澶嘃br /> 1. 鍘熷瓙绾ф姏鍏夛紙ALP锛夋妧鏈?br /> 闈㈠悜2nm浠ヤ笅鑺傜偣鐨勮〃闈㈢矖绯欏害瑕佹眰锛圧a锛?.1nm锛夛紝Canon Tokki寮€鍙戜簡绛夌瀛愪綋杈呭姪鎶涘厜绯荤粺锛岀粨鍚堝寲瀛︽椿鍖栧拰鐗╃悊鍐插嚮瀹炵幇鍘熷瓙绾у幓闄ゃ€侟/span></p> <p><span style="font-size:16px">2. 缁胯壊鍒堕€犳爣鍑咟br /> 鏈€鏂癝EMI S231216鏍囧噯瑕佹眰璁惧锛欬br /> 鑳借€楋紲3.5kWh/鐗嘃br /> 搴熸按鎺掓斁閲忥紲1.5L/cm²<br /> 95%浠ヤ笂搴熸枡鍥炴敹鐜嘃br /> 鑽忓師鐨凟coPolish绯荤粺宸查€氳繃UL2799闆跺簾寮冪墿璁よ瘉銆侟/span></p> <p><span style="font-size:16px">3. 闆嗘垚璁￠噺鎶€鏈?br /> 灏嗘き鍋忎华銆乆灏勭嚎鑽у厜鍏夎氨锛圶RF锛夌瓑妫€娴嬫ā鍧楃洿鎺ュ祵鍏ユ姏鍏夊崟鍏冿紝浣挎祴閲忚ˉ鍋块棴鐜椂闂翠粠鍒嗛挓绾х缉鐭嚦绉掔骇锛孉SML鐨凥MI ebeam绯荤粺宸插疄鐜?0nm閲忕骇鐨勫師浣嶆娴嬨€侟/span></p> <p><span style="font-size:16px">褰撳墠鍏ㄧ悆<a href="/">CMP璁惧</a>甯傚満鍛堢幇"鍙屽己浜夐湼"鏍煎眬锛屽簲鐢ㄦ潗鏂欏拰鑽忓師鍚堣鍗犳嵁85%浠介锛屼絾鍥藉唴涓井鍏徃銆佸崕娴锋竻绉戠瓑浼佷笟宸插湪14nm鑺傜偣瀹炵幇绐佺牬銆傞殢鐫€璇勪环鏍囧噯浠?quot;鑳界敤"鍚?quot;濂界敤"婕旇繘锛屾湭鏉ヨ澶囩珵浜夊皢鑱氱劍浜庡伐鑹虹獥鍙ｆ嫇瀹借兘鍔涳紙Process Window锛変笌閲忎骇绋冲畾鎬э紙MP锛夌殑鎸佺画鎻愬崌锛岃繖瑕佹眰璁惧鍟嗕笉浠呮彁渚涚‖浠讹紝鏇磋鏋勫缓鍖呭惈宸ヨ壓knowhow銆佹櫤鑳界畻娉曘€佽€楁潗浼樺寲鍦ㄥ唴鐨勫畬鏁磋В鍐虫柟妗堛€傚湪鍗婂浣撲骇涓氶摼鑷富鍖栨氮娼笅锛屽缓绔嬬鍚堜腑鍥芥櫠鍦嗗巶闇€姹傜殑CMP璁惧璇勪环浣撶郴锛屽皢鎴愪负鎺ㄥ姩鍥戒骇鏇夸唬鐨勫叧閿獊鐮村彛銆侟br /> ‌</span></p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index481.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">鐗规€濊开cmp鎶涘厜鏈烘搷浣滄敞鎰忎簨椤更/div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index483.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> <div class="title-1 font16 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