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</div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px">鍦ㄥ崐瀵间綋鍒堕€犲拰绮惧瘑鍔犲伐棰嗗煙锛屽寲瀛︽満姊版姏鍏夛紙CMP锛夎澶囨槸纭繚鏅跺渾琛ㄩ潰骞虫暣搴︾殑鍏抽敭璁惧銆傜壒鎬濊开CMP鎶涘厜鏈轰綔涓鸿涓氬唴鐨勪富娴佽澶囦箣涓€锛屽叾鎿嶄綔瑙勮寖鐩存帴褰卞搷宸ヨ壓璐ㄩ噺鍜岃澶囧鍛姐€備互涓嬫槸鍩轰簬璁惧鐗规€у拰琛屼笟缁忛獙鎬荤粨鐨勬搷浣滄敞鎰忎簨椤癸紝娑电洊璁惧鍑嗗銆佸伐鑹哄弬鏁拌缃€佹棩甯哥淮鎶ゅ強瀹夊叏瑙勮寖绛夊叧閿幆鑺傘€侟/span></p> <p><span style="font-size:16px"> 涓€銆佽澶囧惎鍔ㄥ墠鐨勫噯澶囧伐浣淈br /> 1. 鐜妫€鏌?br /> 纭繚宸ヤ綔鐜绗﹀悎Class 1000绾ф磥鍑€搴﹁姹傦紝娓╂箍搴︽帶鍒跺湪22±2鈩冦€佹箍搴?5±5%鑼冨洿鍐呫€傚湴闈㈡尟鍔ㄩ渶灏忎簬0.5μm锛岄伩鍏嶅鐣岄渿鍔ㄥ奖鍝嶆姏鍏夌簿搴︺€傛牴鎹悳绱㈢粨鏋滀腑鐨勬渚嬶紝鏌愭櫠鍦嗗巶鍥犵┖璋冪郴缁熸晠闅滃鑷存箍搴﹂鍗囷紝閫犳垚鎶涘厜娑叉尌鍙戦€熺巼寮傚父锛屾渶缁堜骇鐢熻〃闈㈤浘鍖栫己闄枫€侟/span></p> <p><span style="font-size:16px">2. 鑰楁潗鐘舵€佺‘璁｜br /> 鎶涘厜鍨細妫€鏌ユ槸鍚︽湁鍒掔棔鎴栬€佸寲锛堜娇鐢ㄨ秴杩?00灏忔椂闇€鏇存崲锛夛紝瀹夎鏃堕渶鐢ㄤ笓鐢ㄥす鍏风‘淇濆钩鏁村害鍋忓樊锛?.05mm銆侟br /> 鎶涘厜娑诧細闇€棰勭儹鑷?5鈩冨苟鍏呭垎鎼呮媽锛岄伩鍏嶆矇娣€銆傛敞鎰忎笉鍚岄厤鏂癸紙濡備簩姘у寲纭呮垨閾堝熀鎶涘厜娑诧級鐨勫偍瀛樻湡闄愬樊寮傘€侟br /> 閽荤煶淇暣鐩橈細閿愬害妫€娴嬮渶閫氳繃婵€鍏夎灏勪华锛岀（鎹熼噺瓒呰繃30%闇€绔嬪嵆鏇存崲銆侟/span></p> <p><span style="font-size:16px">3. 鏈烘绯荤粺鏍″噯<br /> 閲嶇偣鏍￠獙鎶涘厜澶翠笅鍘嬪姏锛堟帹鑽愪娇鐢?.53psi鑼冨洿锛夊拰鏃嬭浆鍚屽績搴︼紙鍋忓樊锛?.01mm锛夛紝鍚屾椂妫€鏌ョ湡绌哄惛鐩樺瘑灏佹€э紝闃叉鏅跺渾鍦ㄩ珮閫熸棆杞椂浣嶇Щ銆侟/span></p> <p><span style="font-size:16px"> 浜屻€佸伐鑹哄弬鏁颁紭鍖栬鐐更br /> 1. 鍔ㄦ€佸弬鏁板尮閰岦br /> 瀵逛簬300mm鏅跺渾锛屽缓璁浆閫熸搴﹁缃細鎶涘厜澶?090rpm锛屾姏鍏夌洏3050rpm锛岃浆閫熷樊闇€鏍规嵁鏉愭枡纭害鍔ㄦ€佽皟鏁淬€備緥濡傞摐浜掕繛灞傛姏鍏夋椂锛岃浆閫熷樊杩囧ぇ鏄撳鑷磋竟缂樿繃搴︽姏鍏夛紙Edge OverErosion锛夈€侟br /> 鍘嬪姏鎺у埗闇€閰嶅悎鏉愭枡鍘婚櫎鐜囷紙MRR锛夌洃娴嬶紝纭呯墖鎶涘厜閫氬父閲囩敤0.8psi鍘嬪姏锛岃€屼綆k浠嬭川灞傞渶闄嶈嚦0.3psi浠ラ伩鍏嶅闄枫€侟/span></p> <p><span style="font-size:16px">2. 缁堢偣妫€娴嬬瓥鐣?br /> 閲囩敤澶氭ā寮忕粓鐐规娴嬬郴缁燂細<br /> 鐢垫満鐢垫祦鍒嗘瀽娉曢€傜敤浜庨噾灞炲眰锛堝閾滄姏鍏夌粓鐐圭數娴佷笅闄?5%鏃朵负淇″彿锛堻br /> 鍏夊骞叉秹浠敤浜庝粙璐ㄥ眰鍘氬害鐩戞帶<br /> 闇€娉ㄦ剰閬垮厤鎶涘厜娑叉皵娉″鍏夊淇″彿鐨勫共鎵帮紝鍙€氳繃澧炲姞鍐叉礂娴侀噺瑙ｅ喅銆侟/span></p> <p><span style="font-size:16px"> 涓夈€佽繍琛屼腑鐨勫疄鏃剁洃鎺?br /> 1. 寮傚父璇嗗埆涓庡鐞咟br /> 鍒掔棔璀︽姤锛氱珛鍗虫殏鍋滃苟妫€鏌ユ姏鍏夊灚鏄惁鏈夊紓鐗╋紝甯歌浜庨噾鍒氱煶淇暣鍣ㄩ绮掕劚钀姐€侟br /> 娓╁害娉㈠姩锛氭姏鍏夊尯娓╁害瓒呰繃40鈩冮渶鍚姩绱ф€ュ喎鍗达紝闃叉鐑簲鍔涘鑷存櫠鍦嗙繕鏇层€侟br /> 鏍规嵁鏌愬巶鍟嗘暟鎹紙鍙傝€冩悳绱㈢粨鏋滐級锛屽疄鏃舵尟鍔ㄩ璋卞垎鏋愬彲鎻愬墠30鍒嗛挓棰勬祴涓昏酱杞存壙鏁呴殰锛屾尟鍔ㄥ€硷紴0.8m/s²鏃跺簲鍋滄満妫€淇€侟/span></p> <p><span style="font-size:16px">2. 鏁版嵁璁板綍瑙勮寖<br /> 姣忔壒娆￠渶璁板綍锛欬br /> 鎶涘厜鍚庤〃闈㈢矖绯欏害锛圧a锛?.5nm涓哄悎鏍硷級<br /> 鍘婚櫎鐜囧潎鍖€鎬э紙NU%锛?%锛堻br /> 璁惧绱杩愯鏃堕棿锛堢敤浜庨娴嬫€х淮鎶わ級</span></p> <p><span style="font-size:16px"> 鍥涖€佸仠鏈虹淮鎶よ绋婞br /> 1. 鏃ュ父淇濆吇<br /> 姣忔棩浣跨敤鍚庨渶鐢ㄥ幓绂诲瓙姘村啿娲楃璺?0鍒嗛挓锛岄槻姝㈡姏鍏夋恫缁撴櫠鍫靛锛堝挨鍏舵敞鎰弍H锛?0鐨勭⒈鎬ф姏鍏夋恫锛夈€侟br /> 姣忓懆鎷嗗嵏娓呮磥鎶涘厜澶存皵鍔ㄥ瘑灏佸湀锛屾秱鎶逛笓鐢ㄦ盁鑴傚欢闀垮鍛姐€侟/span></p> <p><span style="font-size:16px">2. 娣卞害缁存姢鍛ㄦ湡<br /> 姣忓搴︽洿鎹富杞存鼎婊戞补鑴傦紙寤鸿浣跨敤Krytox GPL205绯诲垪锛堻br /> 姣忓崐骞磋繘琛屼己鏈嶇數鏈虹紪鐮佸櫒鏍″噯<br /> 骞村害澶т慨鏃堕渶鐢ㄧ櫧鍏夊共娑変华妫€娴嬫姏鍏夌洏骞抽潰搴︼紙瑕佹眰锛?μm/200mm锛堻/span></p> <p><span style="font-size:16px"> 浜斻€佸畨鍏ㄦ搷浣滅孩绾军br /> 1. 涓汉闃叉姢<br /> 鎿嶄綔浜哄憳蹇呴』绌挎埓闃查潤鐢垫湇銆佹姢鐩暅鍙婅€愰吀纰辨墜濂椼€傛帴瑙︽阿姘熼吀绫绘姏鍏夋恫鏃讹紝闇€鍦ㄥ簲鎬ユ穻娴磋缃?绫宠寖鍥村唴浣滀笟銆侟/span></p> <p><span style="font-size:16px">2. 绱ф€ュ缃?br /> 鏅跺渾鍗＄洏鏁呴殰鏃讹紝蹇呴』鍏堝垏鏂湡绌烘簮鍐嶆墜鍔ㄨВ閿?br /> 鍖栧鍝佹硠婕忔寜MSDS瑙勭▼澶勭悊锛屼緥濡傛皑姘存姏鍏夋恫娉勬紡闇€鐢?%鏌犳閰镐腑鍜孅/span></p> <p><span style="font-size:16px">3. 绂佺ず鎿嶄綔<br /> 绂佹鍦ㄦ湭瀹夎鏅跺渾鐨勬儏鍐典笅绌鸿浆鎶涘厜澶达紙鍙兘鎹熷潖淇濇寔鐜級<br /> 涓ョ娣风敤涓嶅悓鍝佺墝鎶涘厜娑蹭笌娓呮礂鍓傦紙鍙兘浜х敓鏈夋瘨姘斾綋锛堻/span></p> <p><span style="font-size:16px"> 鍏€佸父瑙侀棶棰樿В鍐虫柟妗圏br /> 1. 琛ㄩ潰娈嬬暀闂<br /> 鑻ュ嚭鐜版阿姘у寲閽涙畫鐣欙紙琛ㄧ幇涓虹櫧鑹查浘鐘讹級锛屽彲閫氳繃澧炲姞鍏嗗０娉㈡竻娲楀姛鐜囷紙寤鸿80W/鍒嗛挓锛夐厤鍚堢█閲奌F婧舵恫澶勭悊銆侟/span></p> <p><span style="font-size:16px">2. 鍧囧寑鎬у紓甯伏br /> 褰撳嚭鐜颁腑蹇冨帤杈圭紭钖勶紙CTE锛夋椂锛屼紭鍏堟鏌ユ姏鍏夊ご姘斿泭鍘嬪姏鏄惁鍧囪　锛屽叾娆￠獙璇佹姏鍏夊灚鐨勫嚬闄烽噺锛堜娇鐢ㄥ帤搴﹁娴嬮噺锛屽嚬闄凤紴50μm闇€鏇存崲锛夈€侟/span></p> <p><span style="font-size:16px">閫氳繃涓婅堪瑙勮寖鎿嶄綔锛岀壒鎬濊开CMP璁惧鍙ǔ瀹氬疄鐜?2鑻卞鏅跺渾锛?.3nm鐨勮〃闈㈢矖绯欏害鍜岋紴95%鐨勮壇鍝佺巼銆傚缓璁缓绔嬪畬鏁寸殑璁惧鍋ュ悍妗ｆ锛岀粨鍚圓I棰勬祴鎬х淮鎶ょ郴缁燂紙鍙傝€冩悳绱㈢粨鏋滀腑鐨勬櫤鑳藉伐鍘傛渚嬶級锛屽彲杩涗竴姝ユ彁鍗囪澶囩患鍚堟晥鐜囷紙OEE锛?5%浠ヤ笂銆侟br /> ‌</span></p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index480.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">鏅跺渾鎶涘厜鏈轰富瑕佺被鍨嬫湁鍝簺</div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index482.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> <div class="title-1 font16 clamp1">CMP璁惧鎬ц兘璇勪环鏍囧噯</div> </a> </div> </div> </div> </div> <script 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