鏅跺渾鍑忚杽鏄崐瀵间綋鍒堕€犱腑鑷冲叧閲嶈鐨勫伐鑹虹幆鑺傦紝鍏剁洰鐨勬槸灏嗘櫠鍦嗗帤搴︿粠鍘熷鐘舵€侊紙閫氬父涓?75μm鎴?25μm锛夊噺钖勮嚦鐩爣鍘氬害锛堝彲鑳戒綆鑷?0μm鐢氳嚦鏇磋杽锛夛紝浠ユ弧瓒冲厛杩涘皝瑁咃紙濡?D IC銆丆hiplet绛夛級瀵硅杽鍨嬪寲銆侀珮闆嗘垚搴︾殑闇€姹傘€備互涓嬫槸鏅跺渾鍑忚杽宸ヨ壓娴佺▼鐨勮缁嗚В鏋愶細
涓€銆佸噺钖勫墠鐨勫噯澶囧伐浣淈br />
1. 鏅跺渾璐磋啘锛圡ounting锛堻br />
鍑忚杽鍓嶉渶鍦ㄦ櫠鍦嗘闈㈣创闄勪繚鎶よ啘锛堝UV鑳惰啘鎴栫儹濉戞€ц兌鑶滐級锛岄槻姝㈢爺纾ㄨ繃绋嬩腑鐢佃矾灞傚彈鎹熴€傝创鑶滈渶婊¤冻浠ヤ笅瑕佹眰锛欬br />
楂樼矘闄勬€э細纭繚鏅跺渾鍦ㄩ珮閫熺爺纾ㄦ椂涓嶇Щ浣嶏紱
浣庡簲鍔涳細閬垮厤鑶滄潗鏀剁缉瀵艰嚧鏅跺渾缈樻洸锛汓br />
鏄撳墺绂绘€э細鍑忚杽鍚庤兘閫氳繃绱绾跨収灏勬垨鍔犵儹杞绘澗鍘婚櫎銆侟/span>
2. 杞芥澘缁戝畾锛圕arrier Bonding锛堻br />
瀵逛簬瓒呰杽鏅跺渾锛?lt;100μm锛夛紝闇€灏嗘櫠鍦嗕复鏃跺浐瀹氬湪鍒氭€ц浇鏉匡紙濡傜幓鐠冩垨纭呭熀鏉匡級涓婏紝浠ュ寮烘満姊扮ǔ瀹氭€с€傚父鐢ㄦ柟娉曞寘鎷細
鐑噴鏀捐兌甯︼紙濡?M鐨凴evalpha锛夛細閫氳繃鍔犵儹閲婃斁绮樻€э紱
铚＄矘缁擄細閫傜敤浜庨珮娓╁伐鑹猴紝浣嗛渶鍚庣画鍖栧娓呮礂銆侟/span>
浜屻€佹櫠鍦嗗噺钖勬牳蹇冨伐鑹裹br /> 1. 绮楃（锛圕oarse Grinding锛堻br /> 璁惧锛氫娇鐢ㄩ噾鍒氱煶鐮傝疆锛?00400鐩級鐨勬棆杞爺纾ㄦ満銆侟br /> 鐩爣锛氬揩閫熷幓闄ゅぇ閮ㄥ垎鏉愭枡锛屽皢鍘氬害闄嶈嚦鐩爣鍊?20~30μm銆侟br /> 鍏抽敭鍙傛暟锛欬br /> 杞€燂細10003000 rpm锛汓br /> 杩涚粰閫熷害锛?5 μm/s锛汓br /> 鍐峰嵈娑诧細鍘荤瀛愭按+闃查攬鍓傦紝闃叉鐑簲鍔涘鑷存櫠鍦嗙牬瑁傘€侟/span>
2. 绮剧（锛團ine Grinding锛堻br />
鐮傝疆鍗囩骇锛氭崲鐢ㄦ洿缁嗛绮掞紙20003000鐩級鐨勯噾鍒氱煶鐮傝疆銆侟br />
鐩殑锛氭秷闄ょ矖纾ㄤ骇鐢熺殑浜氳〃闈㈡崯浼ゅ眰锛圫SD锛夛紝琛ㄩ潰绮楃硻搴︽帶鍒跺湪Ra<0.1μm銆侟br />
鎶€鏈毦鐐癸細
鍘氬害鍧囧寑鎬э細闇€鍔ㄦ€佽皟鏁村帇鍔涘垎甯冿紝杈圭紭璇樊<±2μm锛汓br />
娓╁害鎺у埗锛氬眬閮ㄦ俯鍗囬渶浣庝簬50鈩冿紝閬垮厤鐑簲鍔涜绾广€侟/span>
3. 鍖栧鏈烘鎶涘厜锛圕MP锛屽彲閫夛級
搴旂敤鍦烘櫙锛氬琛ㄩ潰骞虫暣搴﹁姹傛瀬楂樼殑鏅跺渾锛堝TSV宸ヨ壓锛夈€侟br />
宸ヨ壓鐗圭偣锛欬br />
鎶涘厜娑诧細鍚簩姘у寲纭呮垨姘у寲閾堥绮掔殑纰辨€ф憾娑诧紱
鍘婚櫎鐜囷細0.52 μm/min锛屽彲瀹炵幇绾崇背绾ц〃闈㈢矖绯欏害锛圧a<1nm锛夈€侟/span>
涓夈€佽秴钖勬櫠鍦嗙壒娈婂伐鑹裹br />
1. 涓存椂閿悎涓庤В閿悎锛圱emporary Bonding/ Debonding锛堻br />
閿悎鏉愭枡锛氬HD3007绯诲垪鑳舵按锛岃€愰珮娓╄嚦250鈩冿紱
瑙ｉ敭鍚堟柟娉曪細
婵€鍏夊墺绂伙紙Laser LiftOff锛夛細绱婵€鍏夐€忚繃杞芥澘鍒嗚В鑳跺眰锛汓br />
鏈烘婊戠Щ锛氶€傜敤浜庝綆搴斿姏鑳舵潗銆侟/span>
2. 杈圭紭淇暣锛圗dge Trimming锛堻br /> 蹇呰鎬э細鍑忚杽鍚庢櫠鍦嗚竟缂樻槗浜х敓寰绾癸紝闇€閫氳繃骞叉硶鍒昏殌鎴栨縺鍏夊垏鍓蹭慨鏁淬€侟br /> 璁惧锛氱瓑绂诲瓙鍒昏殌鏈猴紙CF4/O2姘斾綋锛夋垨鐨婵€鍏夊櫒銆侟/span>
3. 搴斿姏閲婃斁閫€鐏紙Annealing锛堻br /> 鏉′欢锛?00400鈩冩爱姘旂幆澧冧腑澶勭悊12灏忔椂锛汓br /> 鏁堟灉锛氶檷浣庣爺纾ㄥ鑷寸殑鏅舵牸鐣稿彉锛屾彁鍗囨満姊板己搴︺€侟/span>
鍥涖€佽川閲忔帶鍒朵笌妫€娴婞br />
1. 鍘氬害娴嬮噺
鎺ヨЕ寮忥細鍗冨垎琛ㄦ垨鐢垫劅娴嬪井浠紝绮惧害±0.1μm锛汓br />
闈炴帴瑙﹀紡锛氱孩澶栧共娑変华鎴栧厜璋辨き鍋忎华锛岄€傜敤浜庨€忔槑钖勮啘鏅跺渾銆侟/span>
2. 琛ㄩ潰缂洪櫡妫€娴婞br />
鍏夊鏄惧井闀滐細瑙傛祴鍒掔棔銆佸穿杈癸紱
AFM锛堝師瀛愬姏鏄惧井闀滐級锛氬垎鏋愮撼绫崇骇绮楃硻搴︺€侟/span>
3. 鏈烘寮哄害娴嬭瘯
涓夌偣寮洸娉曪細璇勪及鎶楁姌寮哄害锛汓br />
鐜笂鐜紙RingonRing锛夋祴璇曪細妯℃嫙灏佽搴斿姏涓嬬殑鍙潬鎬с€侟/span>
浜斻€佹妧鏈寫鎴樹笌鍙戝睍瓒嬪娍
1. 瓒呰杽鏅跺渾锛?lt;50μm锛夌殑鐡堕
鏄撶鎬э細闇€寮€鍙戜綆搴斿姏鐮旂（宸ヨ壓锛汓br />
缈樻洸鎺у埗锛氶€氳繃澶氬眰鑶滅粨鏋勮璁¤ˉ鍋垮簲鍔涖€侟/span>
2. 鍏堣繘鎶€鏈簲鐢?br />
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鏅鸿兘鑷€傚簲鐮旂（锛欰I瀹炴椂璋冩暣鍘嬪姏涓庤浆閫燂紝鎻愬崌鍧囧寑鎬с€侟/span>
3. 鐜繚瑕佹眰
骞叉硶宸ヨ壓鏇夸唬婀挎硶鐮旂（锛屽噺灏戝簾娑叉帓鏀撅紱
閲戝垰鐭崇爞杞洖鏀舵妧鏈紙濡傜數瑙ｄ慨閿愭硶锛夈€傛櫠鍦嗗噺钖勬槸鍗婂浣撳埗閫犱腑鑷冲叧閲嶈鐨勫伐鑹虹幆鑺傦紝鍏剁洰鐨勬槸灏嗘櫠鍦嗗帤搴︿粠鍘熷鐘舵€侊紙閫氬父涓?75μm鎴?25μm锛夊噺钖勮嚦鐩爣鍘氬害锛堝彲鑳戒綆鑷?0μm鐢氳嚦鏇磋杽锛夛紝浠ユ弧瓒冲厛杩涘皝瑁咃紙濡?D IC銆丆hiplet绛夛級瀵硅杽鍨嬪寲銆侀珮闆嗘垚搴︾殑闇€姹傘€備互涓嬫槸鏅跺渾鍑忚杽宸ヨ壓娴佺▼鐨勮缁嗚В鏋忺/span>
鍏€佸疄闄呭簲鐢ㄦ渚婞br />
浠ュ彴绉數鐨凜oWoS灏佽涓轰緥锛屽叾鏅跺渾鍑忚杽娴佺▼濡備笅锛欬br />
1. 12鑻卞鏅跺渾浠?75μm鍑忚杽鑷?00μm锛汓br />
2. 閲囩敤涓存椂閿悎鎶€鏈爢鍙犲灞傛櫠鍦嗭紱
3. 閫氳繃TSV瀹炵幇鍨傜洿浜掕繛锛屾渶缁堝帤搴︽帶鍒跺湪200μm浠ュ唴銆侟/span>
缁撹
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