鏅跺渾鍑忚杽鏄崐瀵间綋鍒堕€犱腑鐨勫叧閿伐鑹轰箣涓€锛屼富瑕佺敤浜庨檷浣庢櫠鍦嗙殑鍘氬害浠ユ弧瓒崇壒瀹氬櫒浠讹紙濡傚姛鐜囧櫒浠躲€丮EMS浼犳劅鍣ㄣ€?D灏佽绛夛級鐨勯渶姹傘€傞殢鐫€鍗婂浣撴妧鏈悜楂樻€ц兘銆佸皬鍨嬪寲鍜岄泦鎴愬寲鍙戝睍锛屾櫠鍦嗗噺钖勬妧鏈殑閲嶈鎬ф棩鐩婂嚫鏄俱€備互涓嬫槸鏅跺渾鍑忚杽鐨勫父瑙佹墜娈靛強鍏舵妧鏈壒鐐癸細
1. 鏈烘鐮旂（锛圡echanical Grinding锛堻br /> 鏈烘鐮旂（鏄?a href="/">鏅跺渾鍑忚杽鏈€浼犵粺涓斿簲鐢ㄦ渶骞挎硾鐨勬柟娉曪紝閫氳繃閲戝垰鐭崇爞杞殑楂橀€熸棆杞鏅跺渾鑳岄潰杩涜鐗╃悊纾ㄥ墛銆傚叾鏍稿績浼樺娍鍦ㄤ簬鏁堢巼楂樸€佹垚鏈綆锛岄€傚悎澶ф壒閲忕敓浜с€侟br /> - 宸ヨ壓姝ラ锛氶€氬父鍒嗕负绮楃（锛堝幓闄ゅぇ閮ㄥ垎鏉愭枡锛夊拰绮剧（锛堝疄鐜拌〃闈㈠钩鏁达級锛岀爺纾ㄥ悗鍘氬害鍙帶鍒跺湪鍑犲崄寰背鐢氳嚦鏇磋杽銆侟br /> - 鎶€鏈寫鎴橈細鐮旂（杩囩▼鏄撲骇鐢熸満姊板簲鍔涳紝鍙兘瀵艰嚧鏅跺渾缈樻洸鎴栧井瑁傜汗锛岄渶閰嶅悎鍚庣画鐨勫簲鍔涢噴鏀惧伐鑹猴紙濡傚寲瀛︽満姊版姏鍏夋垨铓€鍒伙級銆侟br /> - 搴旂敤鍦烘櫙锛氬箍娉涘簲鐢ㄤ簬鍔熺巼鍣ㄤ欢锛堝IGBT锛夊拰瀛樺偍鑺墖鐨勫埗閫犮€侟/span>
2. 鍖栧鏈烘鎶涘厜锛圕MP, Chemical Mechanical Polishing锛堻br /> CMP缁撳悎浜嗗寲瀛﹁厫铓€鍜屾満姊扮爺纾ㄧ殑浣滅敤锛岄€氳繃鎶涘厜娑蹭腑鐨勫寲瀛﹁瘯鍓傝蒋鍖栬〃闈㈡潗鏂欙紝鍐嶇敱鎶涘厜鍨満姊板幓闄わ紝瀹炵幇楂樼簿搴﹀噺钖勪笌琛ㄩ潰骞虫粦鍖栥€侟br /> - 浼樺娍锛氬彲娑堥櫎鏈烘鐮旂（鐨勫簲鍔涙崯浼わ紝琛ㄩ潰绮楃硻搴﹀彲杈剧撼绫崇骇锛岄€傚悎瀵硅〃闈㈣川閲忚姹傞珮鐨勫櫒浠躲€侟br /> - 灞€闄愭€э細鏉愭枡鍘婚櫎閫熺巼杈冧綆锛屾垚鏈緝楂橈紝閫氬父浣滀负鏈烘鐮旂（鍚庣殑绮惧姞宸ユ楠ゃ€侟br /> - 鍙戝睍鍔ㄦ€侊細杩戝勾鏉ワ紝閽堝瓒呰杽鏅跺渾锛堝<50μm锛夌殑CMP宸ヨ壓浼樺寲鎴愪负鐮旂┒鐑偣銆侟/span>
3. 婀挎硶鍒昏殌锛圵et Etching锛堻br /> 婀挎硶鍒昏殌鍒╃敤鍖栧婧舵恫锛堝HF/HNO3娣峰悎娑插纭呯殑鍚勫悜鍚屾€у埢铓€锛夐€夋嫨鎬ф憾瑙ｆ櫠鍦嗘潗鏂欙紝鏃犻渶鏈烘鎺ヨЕ锛屽彲閬垮厤搴斿姏闂銆侟br /> - 鐗圭偣锛氬伐鑹虹畝鍗曘€佹垚鏈綆锛屼絾鍒昏殌閫熺巼鍜屽潎鍖€鎬у彈婧舵恫娴撳害銆佹俯搴﹀奖鍝嶆樉钁椼€侟br /> - 搴旂敤闄愬埗锛氬洜鍚勫悜鍚屾€у埢铓€浼氬鑷磋竟缂樿疆寤撳渾婊戯紝闇€閰嶅悎鍏夊埢鑳朵繚鎶ゅ浘褰㈠寲鍖哄煙锛屽鐢ㄤ簬MEMS鍣ㄤ欢鎴栫壒瀹氱粨鏋勭殑灞€閮ㄥ噺钖勩€侟/span>
4. 骞叉硶鍒昏殌锛圖ry Etching锛堻br /> 骞叉硶鍒昏殌閫氳繃绛夌瀛愪綋锛堝鍙嶅簲绂诲瓙鍒昏殌RIE锛夋垨姘旂浉鍖栧鐗╄川锛堝XeF2锛夊幓闄ゆ潗鏂欙紝鍏锋湁楂樻柟鍚戞€у拰鍙帶鎬с€侟br /> - 鎶€鏈紭鍔匡細鍙疄鐜板悇鍚戝紓鎬у埢铓€锛岄€傚悎澶嶆潅涓夌淮缁撴瀯鐨勭簿纭噺钖勶紝濡俆SV锛堢閫氬瓟锛夊伐鑹轰腑鐨勬櫠鍦嗚儗闈㈠紑鍙ｃ€侟br /> - 鎸戞垬锛氳澶囨垚鏈珮锛屽伐鑹哄弬鏁帮紙姘斾綋娴侀噺銆佸皠棰戝姛鐜囩瓑锛夐渶绮剧粏璋冩帶銆侟br /> - 鍒涙柊鏂瑰悜锛氭繁纭呭埢铓€锛圖RIE锛夋妧鏈粨鍚圔osch宸ヨ壓锛屽凡鍦ㄥ厛杩涘皝瑁呬腑骞挎硾搴旂敤銆侟/span>
5. 绛夌瀛愪綋鍑忚杽锛圥lasma Thinning锛堻br /> 绛夌瀛愪綋鍑忚杽鏄共娉曞埢铓€鐨勪竴绉嶅欢浼革紝閫氳繃楂樺瘑搴︾瓑绂诲瓙浣擄紙濡侷CP锛夎桨鍑绘櫠鍦嗚〃闈紝瀹炵幇绾崇背绾х簿搴︾殑鏉愭枡鍘婚櫎銆侟br /> - 鐗圭偣锛氭棤鎺ヨЕ銆佷綆搴斿姏锛岄€傚悎瓒呰杽鏅跺渾锛堝<10μm锛夋垨鏌旀€х數瀛愬櫒浠剁殑鍒跺銆侟br /> - 鍏稿瀷妗堜緥锛氬湪灏勯鍣ㄤ欢鍜岀敓鐗╀紶鎰熷櫒鍒堕€犱腑锛岀瓑绂诲瓙浣撳噺钖勫彲閬垮厤浼犵粺鐮旂（瀵艰嚧鐨勬€ц兘鍔ｅ寲銆侟/span>
6. 婵€鍏夊噺钖勶紙Laser Ablation锛堻br /> 婵€鍏夊噺钖勫埄鐢ㄩ珮鑳芥縺鍏夋潫锛堝绱鎴栭绉掓縺鍏夛級姹藉寲鏉愭枡锛屽叿鏈夐潪鎺ヨЕ銆佸眬閮ㄥ姞宸ョ殑浼樺娍銆侟br /> - 閫傜敤鍦烘櫙锛氶€傜敤浜庣‖鑴嗘潗鏂欙紙濡傜⒊鍖栫銆佽摑瀹濈煶锛夋垨闇€瑕侀€夋嫨鎬у噺钖勭殑缁撴瀯锛屽婵€鍏夐殣褰㈠垏鍓诧紙Stealth Dicing锛夊墠鐨勫眬閮ㄥ噺钖勩€侟br /> - 鎶€鏈毦鐐癸細鐑奖鍝嶅尯锛圚AZ锛夋帶鍒舵槸鍏抽敭锛岄渶浼樺寲婵€鍏夋尝闀裤€佽剦鍐查鐜囩瓑鍙傛暟浠ラ伩鍏嶅井瑁傜汗銆侟/span>
7. 涓存椂閿悎涓庤В閿悎鎶€鏈紙Temporary Bonding/ Debonding锛堻br /> 瀵逛簬瓒呰杽鏅跺渾锛?lt;50μm锛夛紝鍑忚杽鍓嶉渶閫氳繃涓存椂閿悎锛堝鑳堕粡鍓傛垨鐜荤拑杞戒綋锛夊浐瀹氭櫠鍦嗘闈紝鍑忚杽鍚庡啀瑙ｉ敭鍚堛€侟br /> - 鏉愭枡閫夋嫨锛氱传澶栧浐鍖栬兌銆佺儹閲婃斁鑳剁瓑涓存椂閿悎鏉愭枡闇€婊¤冻楂樻俯宸ヨ壓鍏煎鎬у拰浣庢畫鐣欒姹傘€侟br /> - 闆嗘垚鏂规锛氳鎶€鏈父涓庢満姊扮爺纾ㄦ垨CMP鑱旂敤锛屾槸3D IC鍜孎an-Out灏佽鐨勬牳蹇冨伐鑹轰箣涓€銆侟/span>
8. 鏂板叴鎶€鏈細鏅鸿兘鍑忚杽涓庡湪绾跨洃娴婞br /> 闅忕潃宸ヤ笟4.0鐨勬帹杩涳紝鏅鸿兘鍑忚杽鎶€鏈粨鍚堝疄鏃跺帤搴︾洃娴嬶紙濡傜孩澶栧共娑変华鎴栨縺鍏夋祴璺濅华锛夊拰鑷€傚簲鎺у埗绯荤粺锛屽彲鏄捐憲鎻愬崌鍑忚杽鍧囧寑鎬у拰鑹巼銆備緥濡傦紝AI绠楁硶閫氳繃鍒嗘瀽鐮旂（杩囩▼涓殑鎸姩淇″彿锛屽姩鎬佽皟鏁寸爞杞帇鍔涗笌杞€熴€侟/span>
鎶€鏈姣斾笌閫夊瀷寤鸿
| 鏂规硶 | 鍘氬害鑼冨洿 | 琛ㄩ潰璐ㄩ噺 | 搴斿姏鎺у埗 | 鎴愭湰 | 閫傜敤鍦烘櫙 |
|---------------|----------------|------------|----------|---------|------------------------|
| 鏈烘鐮旂（ | 50μm浠ヤ笂 | 涓€鑸 | 杈冨樊 | 浣 | 鍔熺巼鍣ㄤ欢銆佸瓨鍌ㄨ姱鐗 |
| CMP | 10-100μm | 鏋佷匠 | 浼樼 | 楂 | 楂樼閫昏緫鑺墖銆佸厜瀛﹀櫒浠 |
| 婀挎硶鍒昏殌 | 灞€閮ㄥ噺钖 | 涓€鑸 | 浼樼 | 涓 | MEMS銆佷紶鎰熷櫒 |
| 骞叉硶鍒昏殌 | 1-100μm | 鑹ソ | 浼樼 | 楂 | 3D灏佽銆乀SV |
| 婵€鍏夊噺钖 | 灞€閮ㄦ垨鏁翠綋 | 杈冨ソ | 鑹ソ | 杈冮珮 | 纭剢鏉愭枡銆佺壒娈婄粨鏋 |
鏈潵瓒嬪娍
- 瓒呰杽鏅跺渾闇€姹傚闀匡細闅忕潃杞﹁浇鑺墖鍜屽彲绌挎埓璁惧鐨勫彂灞曪紝瀵?lt;20μm鏅跺渾鐨勫噺钖勫伐鑹烘彁鍑烘洿楂樿姹傘€侟br />
- 缁胯壊鍒堕€狅細鍑忓皯鐮旂（搴熸枡鍜屽寲瀛﹀簾娑茬殑鐜繚鍨嬪噺钖勬妧鏈紙濡傜數瑙ｇ爺纾級姝ｅ湪鐮斿彂涓€侟br />
- 寮傝川闆嗘垚鎺ㄥ姩鍒涙柊锛歋iC銆丟aN绛夊绂佸甫鍗婂浣撶殑鍑忚杽鎶€鏈渶瑙ｅ喅楂樼‖搴︽潗鏂欑殑鍔犲伐闅鹃銆侟/span>
鏅跺渾鍑忚杽鎶€鏈殑閫夋嫨闇€缁煎悎鑰冭檻鏉愭枡鐗规€с€佸櫒浠堕渶姹傚強鎴愭湰鍥犵礌锛屾湭鏉ュ宸ヨ壓铻嶅悎锛堝“鏈烘鐮旂（+CMP+骞叉硶鍒昏殌”缁勫悎锛夊皢鎴愪负涓绘祦鏂瑰悜銆侟br />
