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">鏅跺渾鑳岄潰鍑忚杽宸ヨ壓姝ラ涓庡師鐞嗚В鏋忺/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px">鏅跺渾鑳岄潰鍑忚杽宸ヨ壓鏄崐瀵间綋鍒堕€犱腑鐨勫叧閿幆鑺傦紝灏ゅ叾鍦ㄤ笁缁撮泦鎴愩€佸厛杩涘皝瑁呭強鍔熺巼鍣ㄤ欢绛夐鍩燂紝鍏舵妧鏈簿搴︾洿鎺ュ奖鍝嶈姱鐗囨€ц兘涓庡彲闈犳€с€傝宸ヨ壓閫氳繃鏈烘鐮旂（銆佸寲瀛︽満姊版姏鍏夛紙CMP锛夈€佹箍娉?骞叉硶鍒昏殌绛夊姝ラ鍗忓悓锛屽疄鐜版櫠鍦嗗帤搴︿粠鍒濆750μm闄嶈嚦50μm鐢氳嚦鏇磋杽鐨勯渶姹傘€備互涓嬩粠宸ヨ壓鍘熺悊銆佹妧鏈楠ゅ強琛屼笟鎸戞垬涓夋柟闈㈠睍寮€瑙ｆ瀽銆侟/span></p> <p><span style="font-size:16px"> 涓€銆佸伐鑹哄師鐞嗭細鍔涘涓庡寲瀛︾殑鍗忓悓浣滅敤<br /> <a href="/">鏅跺渾鍑忚杽</a>鐨勬牳蹇冨湪浜庡幓闄ょ琛簳鏉愭枡鐨勫悓鏃朵繚鎸佸櫒浠跺眰瀹屾暣鎬с€備紶缁熷伐鑹轰緷璧?quot;绮楃（-绮剧（-鎶涘厜"涓夌骇閫掕繘妯″紡锛氱矖纾ㄩ噰鐢ㄩ噾鍒氱煶鐮傝疆浠?0-50μm/min閫熺巼蹇€熷幓闄や富浣撳帤搴︼紱绮剧（鍒囨崲鑷虫爲鑴傜粨鍚堝墏鐮傝疆锛屽皢琛ㄩ潰绮楃硻搴︼紙Ra锛夋帶鍒跺湪0.1μm浠ュ唴锛涙渶缁堥€氳繃CMP宸ヨ壓娑堥櫎浜氳〃闈㈡崯浼ゅ眰銆傚浜庤秴钖勬櫠鍦嗭紙<50μm锛夛紝闇€寮曞叆涓存椂閿悎/瑙ｉ敭鍚堟妧鏈紝閲囩敤鐜荤拑杞芥澘鎴栫传澶栬В鑳惰啘锛堝3M鐨刄V tapes锛夋彁渚涙満姊版敮鎾戙€侟/span></p> <p><span style="font-size:16px">鍖栧杈呭姪宸ヨ壓涓紝HF/HNO3娣峰悎婧舵恫鍙疄鐜伴€夋嫨鎬у埢铓€锛屽叾鍙嶅簲閫熺巼鍙楁幒鏉傛祿搴﹀奖鍝嶏細閲嶆幒鏉俻鍨嬬鍒昏殌閫熺巼鍙揪100μm/min锛岃€岃交鎺烘潅鍖哄煙浠?-5μm/min銆傚共娉曞埢铓€鍒欓€氳繃SF6绛夌瀛愪綋瀹炵幇鍚勫悜鍚屾€у埢铓€锛岄€傜敤浜庡鏉傜粨鏋勬櫠鍦嗐€傚€煎緱娉ㄦ剰鐨勬槸锛?023骞翠笢浜數瀛愬紑鍙戠殑浣庢俯绛夌瀛愪綋鍑忚杽绯荤粺锛屽彲灏嗙儹棰勭畻鎺у埗鍦?0鈩冧互涓嬶紝閬垮厤楂樻俯瀵艰嚧鐨勯噾灞炰簰杩炲眰缈樻洸闂銆侟/span></p> <p><span style="font-size:16px"> 浜屻€佸伐鑹烘祦绋嬶細浠庣矖鍔犲伐鍒扮撼绫崇骇骞虫暣搴?br /> 1. 棰勫鐞嗛樁娈袋br /> 鏅跺渾姝ｉ潰闇€鏃嬫秱鍏夊埢鑳舵垨绮樿创淇濇姢鑶滐紝闃叉鐮旂（娑叉薄鏌撳櫒浠跺眰銆備笁鏄熷湪3D NAND鐢熶骇涓噰鐢ㄨ嫰骞剁幆涓佺儻锛圔CB锛夎兌浣滀负涓存椂閿悎鏉愭枡锛屽叾鐑啫鑳€绯绘暟锛圕TE锛変笌纭呭尮閰嶅害杈?8%銆侟/span></p> <p><span style="font-size:16px">2. 鏈烘鍑忚杽<br /> 绮楃（閲囩敤320-400鐩噾鍒氱煶鐮傝疆锛屼富杞磋浆閫?000-3000rpm锛岃繘缁欓€熷害20-30mm/s銆傜簿纾ㄩ樁娈靛垏鎹㈣嚦2000-3000鐩爞杞紝琛ㄩ潰娉㈢汗搴︼紙Waviness锛夊彲鎺у埗鍦?.3μm/20mm浠ュ唴銆傛棩鏈珼isco鍏徃鐨凞GP8760鏈哄瀷閫氳繃鍦ㄧ嚎鍘氬害鐩戞祴绯荤粺锛屽彲瀹炵幇±1μm鐨勫帤搴﹀叕宸€侟/span></p> <p><span style="font-size:16px">3. 搴斿姏娑堥櫎<br /> 鐮旂（瀵艰嚧鐨勪綅閿欏眰娣卞害绾?-15μm锛岄渶閫氳繃浣庡帇CMP锛?lt;3psi锛夊幓闄ゃ€傚彴绉數鍦?nm宸ヨ壓涓紑鍙戜簡浜屾哀鍖栫纾ㄦ枡涓庢哀鍖栭搱娣峰悎鐨勬姏鍏夋恫锛屾潗鏂欏幓闄ょ巼锛圡RR锛夎揪0.8μm/min锛屽悓鏃跺皢琛ㄩ潰寰垝鐥曞瘑搴﹂檷浣庤嚦<0.1/cm²銆侟/span></p> <p><span style="font-size:16px">4. 瓒呰杽宸ヨ壓鎸戞垬<br /> 褰撳帤搴?lt;50μm鏃讹紝鏅跺渾鏂妯￠噺鎬ュ墽涓嬮檷銆傚簲鐢ㄦ潗鏂欏叕鍙哥殑瑙ｅ喅鏂规鏄噰鐢ㄧ瀛愭敞鍏ュ舰鎴愰殣鍩嬪瀛旂灞傦紙BPSi锛夛紝閫氳繃HF钂告苯鍒昏殌瀹炵幇鑷仠姝㈠噺钖勶紝鏈€缁堝帤搴︽尝鍔?plusmn;0.5μm銆傝嫳鐗瑰皵鍦‵overos 3D灏佽涓紝浣跨敤婵€鍏夊墺绂绘妧鏈皢12鑻卞鏅跺渾鍑忚杽鑷?0μm锛岀繕鏇叉帶鍒跺湪<50μm銆侟/span></p> <p><span style="font-size:16px"> 涓夈€佹妧鏈墠娌夸笌琛屼笟鐥涚偣<br /> 1. 钖勬櫠鍦嗕紶杈撶郴缁烖br /> 寰峰浗SUSS MicroTec寮€鍙戠殑鐪熺┖鍚搁檮鏈烘鎵嬶紝閲囩敤澶氬瓟闄剁摲鍚哥洏锛屾帴瑙﹀帇鍔?lt;0.1N/cm²锛屽彲瀹夊叏鎼繍30μm鍘氭櫠鍦嗐€傚叾涓撳埄鎶€鏈€氳繃瀹炴椂姘斿帇璋冭妭琛ュ伩鏅跺渾缈樻洸锛岀牬鎹熺巼<0.01%銆侟/span></p> <p><span style="font-size:16px">2. 缂洪櫡妫€娴嬪崌绾?br /> 浼犵粺鍏夊妫€娴嬮毦浠ュ彂鐜颁簹琛ㄩ潰寰绾广€傛棩绔嬮珮鏂板紑鍙戠殑婵€鍏夋暎灏勬柇灞傛垚鍍忥紙LST锛夌郴缁燂紝鍙娴嬫繁搴﹁揪20μm鐨?μm绾ц绾癸紝杈僗灏勭嚎琛嶅皠锛圶RD锛夋晥鐜囨彁鍗?鍊嶃€侟/span></p> <p><span style="font-size:16px">3. 鏉愭枡鍒涙柊<br /> 浣忓弸鍖栧2024骞存帹鍑虹殑绾崇背澶嶅悎鑳惰啘锛屾潹姘忔ā閲忚揪8GPa锛屽彲鍦?00鈩冧笅淇濇寔绋冲畾鎬э紝浣跨⒊鍖栫鍔熺巼鍣ㄤ欢鍑忚杽宸ヨ壓绐楀彛鎷撳30%銆侟/span></p> <p><span style="font-size:16px">褰撳墠琛屼笟浠嶉潰涓翠笁澶ф寫鎴橈細鈶犺秴钖勬櫠鍦嗭紙<10μm锛夌殑鎵归噺鐢熶骇鑹巼涓嶈冻60%锛涒憽寮傝川闆嗘垚涓/鍖栧悎鐗╁崐瀵间綋鍑忚杽閫熺巼宸紓瀵艰嚧鐣岄潰搴斿姏锛涒憿鍥炴敹鐮旂（娑茬殑绾崇背棰楃矑姹℃煋鎺у埗銆侫SML涓嶪MEC姝ｅ湪鑱斿悎寮€鍙戝熀浜嶦UV鍏夊埢鐨勫眬閮ㄥ噺钖勬妧鏈紝鏈夋湜瀹炵幇5μm绮惧害閫夋嫨鎬у噺钖勩€侟/span></p> <p><span style="font-size:16px">闅忕潃chiplet鎶€鏈櫘鍙婏紝鑳岄潰鍑忚杽宸ヨ壓灏嗗悜"灞€閮ㄥ噺钖?TSV闆嗘垚"鏂瑰悜鍙戝睍銆備笢浜伐涓氬ぇ瀛︽渶鏂扮爺绌惰〃鏄庯紝椋炵婵€鍏夎緟鍔╁噺钖勫彲浣?00mm鏅跺渾鐨勬€诲帤搴﹀彉寮傦紙TTV锛夐檷鑷?.3μm锛屼负涓嬩竴浠?D IC鎻愪緵鏂版€濊矾銆傝鎶€鏈殑浜т笟鍖栬繘绋嬶紝灏嗘垚涓鸿　閲忓崐瀵间綋瑁呭鑷富鍖栨按骞崇殑閲嶈鎸囨爣銆侟br /> ‌</span></p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index486.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">鏅跺渾鑳岄潰鍑忚杽鏄噺灏忕粡楠屽帤搴︾殑宸ヨ壓</div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index488.html" target="_blank"> <div class="type-1 font18 ">涓嬩竴绡 <i></i></div> <div class="title-1 font16 clamp1">鍙岄潰鐮旂（鏈虹殑缁存姢鏂规硶</div> </a> </div> </div> </div> </div> <script src="/../static/js/jquery.share.min.js"></script> <div class="tsemid-contact-popup" id="from1" > <div class="tsemid-contact-popup-content"> <div class="close-1" ><a href="javascript:;"></a></div> <div class="tsemid-product-consultation" 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