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class="tsemid-news-detial-text font16 flh30 "> <p>鏅跺渾鑳岄潰鍑忚杽鎶€鏈槸鍗婂浣撳埗閫犱腑鐨勫叧閿伐鑹轰箣涓€锛屽叾鏍稿績鐩殑鏄€氳繃鐗╃悊鎴栧寲瀛︽柟娉曞皢鏅跺渾鑳岄潰鏉愭枡鍘婚櫎鑷崇壒瀹氬帤搴︼紝浠ユ弧瓒宠姱鐗囧皝瑁呫€佹€ц兘浼樺寲鍙婃垚鏈帶鍒剁瓑澶氶噸闇€姹傘€傝繖涓€鎶€鏈疮绌夸簬闆嗘垚鐢佃矾鍒堕€犵殑涓悗娈碉紝灏ゅ叾鍦ㄤ笁缁撮泦鎴愩€佸厛杩涘皝瑁呯瓑棰嗗煙鎵紨鐫€涓嶅彲鏇夸唬鐨勮鑹层€備互涓嬩粠鎶€鏈師鐞嗐€佸簲鐢ㄥ満鏅強琛屼笟瓒嬪娍涓変釜缁村害灞曞紑鍒嗘瀽銆侟/p> <p> </p> <p> 涓€銆佹妧鏈師鐞嗭細浠庢満姊扮爺纾ㄥ埌鍏堣繘铓€鍒荤殑婕旇繘</p> <p>鏅跺渾鍑忚杽涓昏閫氳繃鏈烘鐮旂（锛圙rinding锛夈€佸寲瀛︽満姊版姏鍏夛紙CMP锛夊拰骞叉硶铓€鍒伙紙Dry Etching锛変笁绫诲伐鑹哄疄鐜般€備紶缁熸満姊扮爺纾ㄩ噰鐢ㄩ噾鍒氱煶鐮傝疆浠ユ瘡鍒嗛挓鏁颁竾杞殑閫熷害鍒囧墛纭呮潗鏂欙紝鍙皢12鑻卞鏅跺渾浠庡垵濮?75μm鍑忚嚦50-100μm锛屼絾浼氬紩鍏ヨ〃闈㈠簲鍔涘井瑁傜汗銆備负娑堥櫎鎹熶激灞傦紝涓氱晫寮€鍙戜簡"绮楃（+绮剧（+婀挎硶铓€鍒?quot;鐨勫鍚堝伐鑹猴紝濡備笢浜簿瀵嗗紑鍙戠殑瓒呯簿瀵嗙爺纾ㄨ澶囧彲灏嗗帤搴﹀亸宸帶鍒跺湪±2μm浠ュ唴銆傝€岄拡瀵?0μm浠ヤ笅鐨勬瀬鑷村噺钖勯渶姹傦紝绛夌瀛愪綋铓€鍒绘妧鏈€氳繃SF6/O2娣峰悎姘斾綋瀹炵幇鍚勫悜鍚屾€у埢铓€锛岄厤鍚堟縺鍏夊墺绂伙紙Laser Lift-off锛夋妧鏈紝宸茶兘瀹炵幇5μm浠ヤ笅鐨勮秴钖勮姱鐗囧埗閫犮€侟/p> <p> </p> <p>鍊煎緱娉ㄦ剰鐨勬槸锛屽噺钖勮繃绋嬩腑闇€鍚屾瑙ｅ喅缈樻洸鎺у埗闂銆傚綋300mm鏅跺渾鍘氬害浣庝簬50μm鏃讹紝鍏跺垰搴︿笅闄嶅鑷翠紶杈撹繃绋嬩腑鏄撳彂鐢熺瑁傘€傚簲鐢ㄦ潗鏂欏叕鍙稿紑鍙戠殑涓存椂閿悎/瑙ｉ敭鍚堬紙Temporary Bonding/ Debonding锛夌郴缁燂紝閲囩敤绱鍥哄寲鑳跺皢鏅跺渾鍥哄畾鍦ㄧ幓鐠冭浇鏉夸笂锛屼娇瓒呰杽鍔犲伐鎴愪负鍙兘銆傝繖绉嶆妧鏈粍鍚堜娇寰楀彴绉數鍦↖nFO-WLCSP灏佽涓疄鐜颁簡25μm鐨勭涓粙灞傞噺浜с€侟/p> <p style="text-align:center"><img alt="鏅跺渾鑳岄潰鍑忚杽" height="215" src="/uploads/image/20250604/cc4-1749023080.jpg" width="320" /></p> <p>璇风偣鍑昏緭鍏ュ浘鐗囨弿杩帮紙鏈€澶?8瀛楋級</p> <p>‌ 浜屻€佸簲鐢ㄥ満鏅細浠庝紶缁熷皝瑁呭埌涓夌淮闆嗘垚鐨勯渶姹傚崌绾?/p> <p>1. 灏佽鍘氬害鎺у埗锛氬湪QFN銆丅GA绛変紶缁熷皝瑁呬腑锛屽噺钖勮嚦150-200μm鍙樉钁楅檷浣庡皝瑁呬綋楂樺害銆傛棩鏈堝厜鐨勬暟鎹樉绀猴紝姣忓噺灏?00μm鍘氬害锛屾墜鏈轰富鏉跨┖闂村埄鐢ㄧ巼鎻愬崌15%銆備絾鏇撮潻鍛芥€х殑绐佺牬鍙戠敓鍦?.5D/3D灏佽棰嗗煙锛屽HBM鍐呭瓨鍫嗗彔瑕佹眰姣忎釜DRAM鑺墖鍑忚杽鑷?0μm锛岄€氳繃TSV瀹炵幇8灞傚爢鍙犲悗鎬诲帤搴︿粛鎺у埗鍦?00μm浠ュ唴銆侟/p> <p> </p> <p>2. 鐑鐞嗕紭鍖栵細鑻辩壒灏斿湪Foveros 3D灏佽涓噰鐢ㄨ儗闈㈠噺钖勮嚦20μm缁撳悎寰嚫鍧楋紙μBump锛夋妧鏈紝浣块€昏緫鑺墖涓庡瓨鍌ㄥ櫒鐨勫瀭鐩撮棿璺濈缉鐭嚦50μm锛岀儹闃婚檷浣?0%銆傜壒鍒湪GaN鍔熺巼鍣ㄤ欢涓紝灏哠iC琛簳鍑忚杽鑷?0μm鍙娇鐑鐜囨彁鍗?鍊嶏紝杩欏鐢靛姩姹借溅閫嗗彉鍣ㄦā鍧楃殑鏁ｇ儹鑷冲叧閲嶈銆侟/p> <p> </p> <p>3. 鏌旀€х數瀛愮獊鐮达細绱㈠凹寮€鍙戠殑CIS鑺墖閫氳繃鑳岄潰鍑忚杽鑷?μm瀹炵幇60°寮洸鍗婂緞锛屽簲鐢ㄤ簬鍐呯闀滄垚鍍忔ā缁勩€傝€屾煍鎬ф樉绀洪┍鍔↖C鏇撮渶瑕佸皢纭呭熀鏉垮噺钖勮嚦3μm浠ヤ笅锛岃繖瑕佹眰寮€鍙戞柊鍨嬭浇浣撹杽鑶滄潗鏂欎互闃叉鍔犲伐鏂銆侟/p> <p> </p> <p> 涓夈€佽涓氳秼鍔匡細鏉愭枡鍒涙柊涓庡伐鑹鸿瀺鍚圏/p> <p>褰撳墠鍑忚杽鎶€鏈闈复涓ゅぇ鎸戞垬锛氫竴鏄鍩烘潗鏂欐帴杩戠墿鐞嗘瀬闄愶紝褰撳帤搴︿綆浜?0μm鏃惰浇娴佸瓙杩佺Щ鐜囨€ュ墽涓嬮檷锛涗簩鏄紓璐ㄩ泦鎴愰渶姹傚偓鐢熸柊宸ヨ壓銆俰mec姝ｅ湪鐮旂┒灏嗘櫠鍦嗙骇鐭冲ⅷ鐑綔涓哄仠姝㈠眰锛屽疄鐜?μm绾х钖勮啘鐨勭簿纭帶鍒躲€傝€岄拡瀵圭涓変唬鍗婂浣擄紝婵€鍏夐殣褰㈠垏鍓诧紙Stealth Dicing锛変笌鍑忚杽宸ヨ壓鐨勫崗鍚屽彲灏哠iC鏅跺渾鍔犲伐鎴愭湰闄嶄綆30%銆侟/p> <p> </p> <p>鍦ㄤ腑鍥藉ぇ闄嗭紝涓姱缁嶅叴寤鸿鐨?鑻卞SiC鐢熶骇绾块娆″疄鐜拌儗闈㈠噺钖勪笌TSV宸ヨ壓闆嗘垚锛屼娇妯″潡瀵奸€氱數闃讳笅闄嶈嚦2mΩ·cm²銆傞暱鐢电鎶€寮€鍙戠殑"鍑忚杽-绌垮瓟-鐢甸晙"涓€浣撳寲璁惧锛屾洿鏄皢鍔犲伐鍛ㄦ湡浠庝紶缁?2灏忔椂鍘嬬缉鑷?灏忔椂銆傛牴鎹甕ole棰勬祴锛屽埌2028骞村叏鐞冩櫠鍦嗗噺钖勮澶囧競鍦鸿妯″皢杈?7浜跨編鍏冿紝鍏朵腑瓒呰杽鍔犲伐锛?lt;50μm锛夊崰姣斿皢瓒呰繃60%銆侟/p> <p> </p> <p>浠庢洿瀹忚瑙嗚鐪嬶紝鍑忚杽鎶€鏈鍦ㄩ噸濉戝崐瀵间綋浜т笟鏍煎眬锛氫竴鏂归潰浣挎懇灏斿畾寰嬪湪灏佽灞傞潰寰椾互寤剁画锛屽彟涓€鏂归潰鎺ㄥ姩鑺墖浠庡钩闈㈣蛋鍚戠珛浣撱€傛湭鏉ラ殢鐫€鍏夊瓙闆嗘垚銆侀噺瀛愬櫒浠剁殑鍏磋捣锛屽師瀛愮骇绮惧害鍑忚杽宸ヨ壓鎴栧皢寮€鍚柊鐨勬妧鏈邯鍏冦€傛濡傚彴绉數鐮斿彂鍓€讳綑鎸崕鎵€瑷€锛?quot;<a href="/">鏅跺渾鍑忚杽</a>宸蹭粠鍗曠函鐨勫昂瀵哥缉鍑忥紝杩涘寲涓虹郴缁熺骇鎬ц兘浼樺寲鐨勬垬鐣ュ伐鍏枫€?quot;杩欎竴鎶€鏈殑鎸佺画鍒涙柊锛屽皢鎴愪负绐佺牬"鍐呭瓨澧?quot;"鍔熻€楀"鐨勫叧閿敮鐐广€侟/p> <p>‌</p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index477.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 clamp1">璐寸墖鏈烘槸浠€涔堬紵鏈変粈涔堜綔鐢紵</div> </a> </div> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index479.html" target="_blank"> <div 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