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class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">甯哥敤鐨勬櫠鍦嗗噺钖勬柟娉曟湁鍝簺</div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p>鏅跺渾鍑忚杽鏄崐瀵间綋鍒堕€犱腑鐨勫叧閿伐鑹猴紝涓昏鐢ㄤ簬闄嶄綆鏅跺渾鍘氬害浠ユ弧瓒冲皝瑁呴渶姹傦紙濡?D IC銆丮EMS锛夊苟鎻愬崌鍣ㄤ欢鎬ц兘锛堝闄嶄綆鐢甸樆鐢靛寤惰繜锛夈€備互涓嬫槸<strong>甯哥敤鍑忚杽鏂规硶</strong>鐨勫垎绫汇€佸師鐞嗐€佷紭缂虹偣鍙婂吀鍨嬪簲鐢細</p> <p><strong>涓€銆佹満姊扮被鍑忚杽鏂规硶</strong></p> <p><strong>1. 鏈烘鐮旂（锛圡echanical Grinding锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氶€氳繃楂橀€熸棆杞殑閲戝垰鐭崇爺纾ㄧ洏涓庢櫠鍦嗘帴瑙︼紝閰嶅悎鍐峰嵈娑茶繘琛岀墿鐞嗗垏鍓娿€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>閫熺巼楂楛/strong>锛氬噺钖勯€熺巼鍙揪1-10 μm/s锛岄€傚悎澶у帤搴︽櫠鍦嗭紙濡?00 μm→200 μm锛夈€侟/p> <p><strong>鎴愭湰浣嶞/strong>锛氳澶囨垚鐔燂紝宸ヨ壓绠€鍗曘€侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>琛ㄩ潰绮楃硻锛圧a > 1 μm锛夛紝闇€鍚庣画鎶涘厜淇銆侟/p> <p>鏈烘搴斿姏鏄撳鑷村井瑁傜汗鍜屽眰閿欍€侟/p> <p><strong>搴旂敤</strong>锛氱鍩烘櫠鍦嗐€丼OI鏅跺渾鐨勫垵濮嬪噺钖勩€侟/p> <p><strong>2. 鐮旂（鍚庢姏鍏夛紙CMP锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氬寲瀛︽満姊版姏鍏夛紙CMP锛夛紝缁撳悎鍖栧婧惰В锛堟姏鍏夋恫锛変笌鏈烘鍒摝锛堟姏鍏夊灚锛夈€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>琛ㄩ潰骞冲潶鍖朁/strong>锛歊a < 5 nm锛屾弧瓒冲厛杩涘埗绋嬪骞虫暣搴︾殑瑕佹眰銆侟/p> <p><strong>鏉愭枡鍏煎鎬?/strong>锛氶€傜敤浜庣銆両II-V鏃忓寲鍚堢墿锛堝GaAs锛夊強缁濈紭灞傘€侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>鎴愭湰楂橈紙鎶涘厜娑叉秷鑰楀ぇ锛夈€侟/p> <p>闇€绮剧‘鎺у埗鍙傛暟锛坧H銆佹俯搴︺€佸帇鍔涳級銆侟/p> <p><strong>搴旂敤</strong>锛氳〃闈慨澶嶃€乀SV锛堢閫氬瓟锛夊簳閮ㄥ噺钖勩€侟/p> <p><strong>浜屻€佸寲瀛︾被鍑忚杽鏂规硶</strong></p> <p><strong>1. 婀挎硶鍖栧鑵愯殌锛圵et Chemical Etching锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氬埄鐢℉F銆丠NO鈧冦€並OH绛夊寲瀛﹁瘯鍓備笌鏅跺渾鍙嶅簲閫夋嫨鎬у幓闄ゆ潗鏂欍€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>瓒呰杽鍖朁/strong>锛氶€傚悎鍑忚杽鑷?lt;50 μm锛堝纭呯墖鍑忚杽鑷?0 μm锛夈€侟/p> <p><strong>鏃犳満姊板簲鍔汓/strong>锛氶伩鍏嶅井瑁傜汗銆侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>鍚勫悜鍚屾€ц厫铓€鏄撳鑷磋竟缂樿繃搴︿镜铓€銆侟/p> <p>闇€涓ユ牸鎺у埗鍖栧鍝侀厤姣斿拰娓╁害銆侟/p> <p><strong>搴旂敤</strong>锛氳秴钖勭鐗囧埗澶囥€乀SV灞€閮ㄥ噺钖勩€侟/p> <p><strong>2. 绛夌瀛愪綋杈呭姪骞叉硶鍒昏殌锛圥lasma Dry Etching锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氶€氳繃绛夌瀛愪綋婵€娲诲弽搴旀皵浣擄紙濡侰l鈧傘€丼F鈧嗭級锛屼笌鏅跺渾琛ㄩ潰鍙嶅簲鐢熸垚鎸ュ彂鎬х墿璐ㄣ€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>楂橀€夋嫨姣擖/strong>锛氬涓嶅悓灞傦紙濡係i涓嶴iO鈧傦級鐨勫埢铓€閫熺巼宸紓澶с€侟/p> <p><strong>鍘熷瓙绾х簿搴?/strong>锛氶€傚悎III-V鏃忓寲鍚堢墿锛圙aN銆両nP锛夊拰楂榢浠嬭川鍑忚杽銆侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>璁惧澶嶆潅锛岃繍琛屾垚鏈珮銆侟/p> <p>鍙兘浜х敓绛夌瀛愪綋浣撴崯浼わ紙PID锛夈€侟/p> <p><strong>搴旂敤</strong>锛欼II-V鏃忓崐瀵间綋鍑忚杽銆侀噾灞炴哀鍖栫墿钖勮啘鍔犲伐銆侟/p> <p><strong>涓夈€佺墿鐞嗙被鍑忚杽鏂规硶</strong></p> <p><strong>1. 绂诲瓙鏉熷埢铓€锛圛on Beam Milling锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氶珮鑳芥儼鎬х瀛愶紙濡侫r鈦猴級杞板嚮鏅跺渾琛ㄩ潰锛岄€氳繃婧呭皠鏁堝簲閫愬眰鍘婚櫎鏉愭枡銆侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>鍚勫悜寮傛€?/strong>锛氬彲绮惧噯鎺у埗渚у褰㈣矊銆侟/p> <p><strong>鏃犲寲瀛︽薄鏌掽/strong>锛氶€傜敤浜庢晱鎰熷櫒浠躲€侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>鍑忚杽閫熺巼浣庯紙~1-10 nm/min锛夈€侟/p> <p>璁惧鏄傝吹锛岀瀛愭鍏ュ彲鑳芥崯浼ゆ櫠鏍笺€侟/p> <p><strong>搴旂敤</strong>锛氶噾灞炰簰杩炵嚎锛堥摑銆侀摐锛夊噺钖勩€丮EMS寰粨鏋勫姞宸ャ€侟/p> <p><strong>2. 婵€鍏夊噺钖勶紙Laser Thinning锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氱传澶栨縺鍏夛紙濡?064 nm锛夐€氳繃鍚告敹灞傦紙鍏夋晱鑳讹級閫夋嫨鎬ф苯鍖栨潗鏂欍€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>闈炴帴瑙﹀紡</strong>锛氶伩鍏嶆満姊板簲鍔涳紝閫傚悎瓒呰杽鏅跺渾锛?lt;50 μm锛夈€侟/p> <p><strong>楂樼簿搴?/strong>锛氬垏鍙ｅ搴?lt;10 μm銆侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>鐑奖鍝嶅尯锛圠IA锛夊彲鑳藉紩鍙戠儹鎹熶激銆侟/p> <p>渚濊禆鍚告敹灞傝璁★紝閫氱敤鎬ц緝浣庛€侟/p> <p><strong>搴旂敤</strong>锛?D灏佽锛圕hiplet閿悎锛夈€佹煍鎬х數瀛愬熀鏉垮噺钖勩€侟/p> <p><strong>鍥涖€佹柊鍏村噺钖勬妧鏈?/strong></p> <p><strong>1. 鐑簲鍔涘噺钖勶紙Thermo-Mechanical Stressing锛堻/strong></p> <p><strong>鍘熺悊</strong>锛氶珮娓╁姞鐑紙400-600°C锛変娇鏅跺渾鍐呴儴鐑啫鑳€宸鑷村眬閮ㄦ柇瑁傘€侟/p> <p><strong>鐗圭偣</strong>锛欬/p> <p><strong>鏃犵墿鐞嗘帴瑙?/strong>锛氶€傚悎鑴嗗急鏉愭枡锛堝鐜荤拑鍩烘澘锛夈€侟/p> <p><strong>鎵归噺澶勭悊</strong>锛氭晥鐜囬珮锛岄€傚悎澶ч潰绉噺钖勩€侟/p> <p><strong>缂虹偣</strong>锛欬/p> <p>鎺у埗闅惧害楂橈紝鏄撳鑷寸繕鏇叉垨宕╄竟銆侟/p> <p>浠呴€傜敤浜庣绛夌壒瀹氭潗鏂欍€侟/p> <p><strong>搴旂敤</strong>锛氭煍鎬LED鍩烘澘銆佸井娴佹帶鑺墖鍑忚杽銆侟/p> <p><strong>浜斻€佹柟娉曞姣斾笌閫夋嫨绛栫暐</strong></p> <p><img alt="" src="https://pics7.baidu.com/feed/77094b36acaf2edd3f857b0dcaac8ce63801932d.jpeg@f_auto?token=75e1aafc63ab118bc80936ccb7824ae4" width="892" />杩帮紙鏈€澶?8瀛桙/p> <p><strong>鏉愭枡鐗规€?/strong>锛欬/p> <p><strong>纭匋/strong>锛氭満姊扮爺纾紙绮楀噺钖勶級→ CMP锛堢簿鎶涘厜锛夈€侟/p> <p><strong>III-V鏃廃/strong>锛氱瓑绂诲瓙浣撳共娉曞埢铓€鎴栨箍娉曡厫铓€銆侟/p> <p><strong>閲戝睘灞侟/strong>锛氱瀛愭潫鍒昏殌銆侟/p> <p><strong>鐩爣鍘氬害</strong>锛欬/p> <p><strong>>200 μm</strong>锛氭満姊扮爺纾ㄣ€侟/p> <p><strong>50-200 μm</strong>锛欳MP鎴栨箍娉曡厫铓€銆侟/p> <p><strong><50 μm</strong>锛氭縺鍏夊噺钖勬垨鐑簲鍔涘噺钖勩€侟/p> <p><strong>琛ㄩ潰璐ㄩ噺瑕佹眰</strong>锛欬/p> <p><strong>绾崇背绾у钩鏁村害</strong>锛欳MP鎴栫瓑绂诲瓙浣撳共娉曞埢铓€銆侟/p> <p><strong>鏃犳満姊板簲鍔汓/strong>锛氭箍娉曡厫铓€鎴栨縺鍏夊噺钖勩€侟/p> <p><strong>鎴愭湰涓庢晥鐜囧钩琛狘/strong>锛欬/p> <p><strong>閲忎骇鍦烘櫙</strong>锛氫紭鍏堥€夋嫨楂樺悶鍚愰噺宸ヨ壓锛堝鏈烘鐮旂（锛夈€侟/p> <p><strong>鐮斿彂/楂樼簿搴﹂渶姹侟/strong>锛氶噰鐢ㄤ綆鏁堜絾楂樼簿搴︾殑鏂规硶锛堝绂诲瓙鏉熷埢铓€锛夈€侟/p> <p><strong>鎬荤粨</strong></p> <p><strong>鍏堣繘鍒剁▼鑺墖</strong>锛氭満姊扮爺纾紙绮楀噺钖勶級→ CMP锛堢簿鎶涘厜锛?rarr; 婀挎硶娓呮礂锛堢己闄蜂慨澶嶏級銆侟/p> <p><strong>MEMS浼犳劅鍣?/strong>锛氱瓑绂诲瓙浣撳共娉曞埢铓€锛堝井缁撴瀯鍑忚杽锛?rarr; 婵€鍏夊垏鍓诧紙鍒嗙锛夈€侟/p> <p><strong>鏌旀€ф樉绀哄睆</strong>锛氱儹搴斿姏鍑忚杽锛堣秴钖勫熀鏉匡級→ 婀挎硶铓€鍒伙紙杈圭紭淇暣锛夈€侟/p> <p><strong>3D灏佽</strong>锛氭縺鍏夊噺钖勶紙Chiplet鍑忚杽锛? 绛夌瀛愪綋娓呮磥锛堣〃闈㈤挐鍖栵級銆侟/p> <p>閫氳繃鍚堢悊鎼厤宸ヨ壓锛屽彲鍦?strong>鍘氬害鍧囧寑鎬э紙±2 μm锛堻/strong>銆?strong>琛ㄩ潰缂洪櫡瀵嗗害锛?lt;100 cm鈦?sup2;锛堻strong>鍙夵/strong>鐢熶骇鎴愭湰</strong>涔嬮棿瀹炵幇鏈€浼樺钩琛★紝婊¤冻鍗婂浣撹涓氬楂樻€ц兘銆侀珮鍙潬鎬у櫒浠剁殑闇€姹傘€侟/p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a 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