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class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">CMP璁惧锛氬崐瀵间綋鍒堕€犱腑鐨勫叧閿姏鍏夊伐鑹鸿В鏋忺/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p><span style="font-size:16px">‌CMP璁惧锛屽嵆鍖栧鏈烘鎶涘厜璁惧锛屾槸鍗婂浣撳埗閫犺繃绋嬩腑涓嶅彲鎴栫己鐨勫叧閿伐鑹鸿澶?zwnj;銆備互涓嬫槸瀵笴MP璁惧鐨勮缁嗕粙缁嶏細</span></p> <p><span style="font-size:16px">涓€銆丆MP璁惧鐨勫熀鏈姛鑳戒笌鍘熺悊</span></p> <p><span style="font-size:16px">CMP璁惧閫氳繃鍖栧鑵愯殌涓庢満姊扮爺纾ㄧ殑鍗忓悓閰嶅悎浣滅敤锛屽幓闄ゆ櫠鍦嗚〃闈㈠浣欑殑鏉愭枡锛屽疄鐜板叏灞€绾崇背绾у钩鍧﹀寲銆傝繖绉嶅叏灞€骞虫暣钀藉樊鍦?nm浠ュ唴鐨勮秴楂樺钩鏁村害锛屾槸淇濋殰鍚庣画鍏夊埢宸ヨ壓濂楀埢绮惧害鍜屽灞傞噾灞炰簰鑱旈珮璐ㄩ噺瀹炵幇鐨勫叧閿€侰MP璁惧闆嗗悎浜嗗涓鍩熺殑鍏堣繘鎶€鏈紝濡傛懇鎿﹀銆佽〃/鐣岄潰鍔涘銆佸垎瀛愬姩鍔涘銆佺簿瀵嗗埗閫犮€佸寲瀛﹀寲宸ャ€佹櫤鑳芥帶鍒剁瓑锛屼娇寰楀叾鎴愪负闆嗘垚鐢佃矾鍒堕€犺澶囦腑杈冧负澶嶆潅涓旂爺鍒堕毦搴﹁緝澶х殑涓€绉?zwnj;1銆侟/span></p> <p><span style="font-size:16px">浜屻€?a href="/">CMP璁惧</a>鐨勬牳蹇冩瀯鎴忺/span></p> <p><span style="font-size:16px">CMP璁惧鐨勬牳蹇冨寘鎷姏鍏夐儴鍒嗗拰娓呮礂閮ㄥ垎锛欬/span></p> <ul> <li> <p><span style="font-size:16px">‌鎶涘厜閮ㄥ垎‌锛氱敱鎶涘厜澶村拰鐮旂（鐩樼粍鎴愩€傛姏鍏夊ご鍚搁檮鏅跺渾骞舵柦鍔犲帇鍔涳紝鐮旂（鐩樺甫鍔ㄦ姏鍏夊灚鏃嬭浆锛岄€氳繃鍖栧鑵愯殌鍜屾満姊扮爺纾ㄧ殑缁撳悎锛屽幓闄ゆ櫠鍦嗚〃闈㈠浣欐潗鏂欍€侟/span></p> </li> <li> <p><span style="font-size:16px">‌娓呮礂閮ㄥ垎‌锛氶€氳繃娓呮礂鍒峰拰渚涙恫绯荤粺鍘婚櫎鎶涘厜鍚庣殑棰楃矑鍜屾薄鏌撶墿锛屼繚璇佹櫠鍦嗘磥鍑€‌2銆侟/span></p> </li> </ul> <p><span style="font-size:16px">涓夈€丆MP璁惧鐨勫垎绫狐/span></p> <p><span style="font-size:16px">CMP璁惧鎸夌収琚姏鍏夋潗鏂欑绫昏繘琛屽垎绫伙紝涓昏鍖呮嫭锛欬/span></p> <ul> <li> <p><span style="font-size:16px">‌琛簳CMP‌锛氫富瑕侀拡瀵圭鏉愭枡浠ュ強钃濆疂鐭炽€佸寲鍚堢墿鍗婂浣撶瓑銆侟/span></p> </li> <li> <p><span style="font-size:16px">‌閲戝睘灞侰MP‌锛氭秹鍙夾l/Cu閲戝睘浜掕仈灞傘€乀a/Ti/TiN/TiNxCy绛夋墿鏁ｉ樆鎸″眰銆佺矘闄勫眰銆侟/span></p> </li> <li> <p><span style="font-size:16px">‌浠嬭川CMP‌锛氬寘鎷琒iO2/BPSG/PSG绛塈LD锛堝眰闂翠粙璐級锛孲I3N4/SiOxNy绛夐挐鍖栧眰銆侀樆鎸″眰‌3銆侟/span></p> </li> </ul> <p><span style="font-size:16px">姝ゅ锛孋MP璁惧杩樻牴鎹簲鐢ㄧ闇€姹傦紝鍒嗕负8鑻卞CMP璁惧銆?2鑻卞CMP璁惧鍜?/8鑻卞鍏煎CMP璁惧‌34銆侟/span></p> <p><span style="font-size:16px">鍥涖€丆MP璁惧鐨勫叧閿€ц兘鎸囨爣</span></p> <p><span style="font-size:16px">鍦ㄩ€夎喘CMP璁惧鏃讹紝闇€鍏虫敞鍏跺叧閿€ц兘鎸囨爣锛屼互纭繚璁惧鑳藉婊¤冻鐢熶骇闇€姹傘€傝繖浜涙寚鏍囧寘鎷細</span></p> <ul> <li> <p><span style="font-size:16px">‌鐮旂（閫熺巼‌锛氬崟浣嶆椂闂村唴鏅跺渾琛ㄩ潰鏉愭枡琚爺纾ㄧ殑鎬婚噺锛岀洿鎺ュ奖鍝嶇敓浜ф晥鐜囥€侟/span></p> </li> <li> <p><span style="font-size:16px">‌鐮旂（鍧囧寑鎬?zwnj;锛氬垎涓虹墖鍐呭潎鍖€鎬у拰鐗囬棿鍧囧寑鎬э紝鐩存帴鍏崇郴鍒拌姱鐗囩殑鎴愬搧鐜囧拰鎬ц兘銆侟/span></p> </li> <li> <p><span style="font-size:16px">‌缂洪櫡閲?zwnj;锛氫富瑕佺己闄峰寘鎷〃闈㈤绮掋€佽〃闈㈠埉浼ゃ€佺爺纾ㄥ墏娈嬬暀绛夛紝灏嗙洿鎺ュ奖鍝嶄骇鍝佺殑鎴愬搧鐜?zwnj;3銆侟/span></p> </li> </ul> <p><span style="font-size:16px">浜斻€?a href="/">CMP璁惧</a>鐨勫簲鐢ㄤ笌鍙戝睍</span></p> <p><span style="font-size:16px">CMP璁惧鍦ㄥ崐瀵间綋鍒堕€犱腑鎵紨鐫€鑷冲叧閲嶈鐨勮鑹诧紝闅忕潃绾垮瓒婃潵瓒婂皬銆佸眰鏁拌秺鏉ヨ秺澶氾紝瀵笴MP鐨勬妧鏈姹備篃瓒婃潵瓒婇珮銆傚湪鍏堣繘鍒剁▼闆嗘垚鐢佃矾鐨勭敓浜ц繃绋嬩腑锛屾瘡涓€鐗囨櫠鍦嗛兘浼氱粡鍘嗗嚑鍗侀亾鐨凜MP宸ヨ壓姝ラ銆傚悓鏃讹紝CMP璁惧甯傚満涔熷憟鐜板嚭楂樺害鍨勬柇鐨勭姸鎬侊紝涓昏鐢辩編鍥藉簲鐢ㄦ潗鏂欏拰鏃ユ湰鑽忓師涓ゅ璁惧鍒堕€犲晢鍗犳嵁銆傜劧鑰岋紝鍦ㄥ浗鍐呭競鍦猴紝闅忕潃鍗婂浣撲骇涓氱殑蹇€熷彂灞曞拰鍥藉浜т笟鏀跨瓥鐨勬敮鎸侊紝鏈湡CMP璁惧鍘傚晢姝ｇН鏋佸竷灞€锛屽姹傚浗浜ф浛浠ｇ殑鏈洪亣‌4銆侟/span></p> <p><span 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