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class="tsemid-news-detial-top-right"> <div class="title-1 font30 ">鍖栧鏈烘鎶涘厜鏈哄湪闆嗘垚鐢佃矾鍒堕€犱腑鐨勫叧閿綔鐢ㄨВ鏋忺/div> </div> </div> <div class="tsemid-news-detial-center"> <div class="tsemid-news-detial-text font16 flh30 "> <p>‌鍖栧鏈烘鎶涘厜鏈猴紙CMP锛夋槸涓€绉嶇粨鍚堝寲瀛﹁厫铓€鍜屾満姊扮爺纾ㄧ殑璁惧锛岀敤浜庡疄鐜版櫠鍦嗚〃闈㈢殑鍘熷瓙绾у钩鏁?zwnj;銆侟/p> <p>CMP鍖栧鏈烘鎶涘厜鏈虹殑宸ヤ綔鍘熺悊鏄€氳繃鎶涘厜娑蹭腑鐨勫寲瀛︽垚鍒嗕笌鏅跺渾琛ㄩ潰鏉愭枡鍙戠敓杞诲井鍖栧鍙嶅簲锛屼娇鍏惰蒋鍖栥€傞殢鍚庯紝鎶涘厜澶存柦鍔犲帇鍔涳紝涓庢姏鍏夊灚鍙戠敓鐩稿杩愬姩锛岀墿鐞嗘€у湴鍘婚櫎鍙嶅簲鐗╋紝浠庤€岃揪鍒版暣骞崇殑鐩殑銆傝繖涓€杩囩▼鍖呮嫭鍖栧浣滅敤鍜屾満姊颁綔鐢ㄧ殑鍗忓悓閰嶅悎锛屾棦鑳芥湁鏁堝幓闄よ〃闈㈡潗鏂欙紝鍙堣兘閬垮厤鍗曠函鏈烘鎶涘厜閫犳垚鐨勮〃闈㈡崯浼?zwnj;銆侟/p> <p><a href="/">CMP鎶涘厜鏈裹/a>鐢卞涓郴缁熺粍鎴愶紝鍖呮嫭鎶涘厜绯荤粺锛堟姏鍏夊ご銆佹姏鍏夊灚銆佹姏鍏夌洏鍜屼慨姝ｅ櫒绛夛級銆佹竻娲楃郴缁熴€佺粓鐐规娴嬬郴缁熴€佹帶鍒剁郴缁熶互鍙婁紶杈撶郴缁熴€傚湪闆嗘垚鐢佃矾鍒堕€犺繃绋嬩腑锛孋MP鎶涘厜鏈虹敤浜庡鏅跺渾琛ㄩ潰杩涜骞冲潶鍖栧鐞嗭紝浠ユ秷闄よ〃闈㈣捣浼忓拰缂洪櫡锛屾彁楂樻櫠鍦嗚〃闈㈢殑骞虫暣搴︼紝杩欏浜庡悗缁伐鑹烘楠ょ殑椤哄埄杩涜鍜岃姱鐗囨€ц兘鐨勬彁鍗囪嚦鍏抽噸瑕併€傛澶栵紝CMP鎶€鏈篃鐢ㄤ簬鎺у埗钖勮啘鐨勫帤搴︼紝纭繚鍏跺湪鍒堕€犺繃绋嬩腑鐨勭簿纭€?zwnj;銆侟/p> <p>CMP鎶€鏈粨鍚堜簡鍖栧鑵愯殌涓庢満姊扮（鍓婄殑鍙岄噸浣滅敤锛岄€氳繃绮惧瘑鎺у埗宸ヨ壓鍙傛暟锛屽疄鐜颁簡瀵瑰伐浠惰〃闈㈢殑楂樼簿搴﹀钩鍧﹀寲澶勭悊銆傛姏鍏夋恫閫氬父鐢辫秴缁嗙（绮掋€佸寲瀛﹁厫铓€鍓傘€佸垎鏁ｅ墏銆佺ǔ瀹氬墏绛夊绉嶆垚鍒嗙粍鎴愶紝杩欎簺鎴愬垎鐨勯€夋嫨鍜岄厤姣旂洿鎺ュ奖鍝嶆姏鍏夋晥鏋溿€侰MP鎶€鏈兘澶熷疄鐜扮撼绫崇骇鐢氳嚦鍘熷瓙绾х殑琛ㄩ潰骞虫暣搴︼紝浣垮緱鍔犲伐鍑虹殑琛ㄩ潰璐ㄩ噺杈惧埌浜嗗墠鎵€鏈湁鐨勯珮搴?zwnj;銆侟/p> <p>闄や簡闆嗘垚鐢佃矾鍒堕€狅紝CMP鎶€鏈繕琚箍娉涘簲鐢ㄤ簬鍏夊鍣ㄤ欢鍔犲伐鍙婄簿瀵嗘満姊伴儴浠跺埗閫犵瓑棰嗗煙锛屽睍鐜板嚭浜嗗法澶х殑搴旂敤娼滃姏鍜屽彂灞曞墠鏅?zwnj;銆傞殢鐫€鎽╁皵瀹氬緥鐨勪笉鏂帹杩涳紝闆嗘垚鐢佃矾鐨勭壒寰佸昂瀵告寔缁缉灏忥紝瀵硅〃闈㈠钩鏁村害鐨勮姹備篃鏃ョ泭涓ヨ嫑銆侰MP鎶€鏈笉鏂繘鍖栵紝浠庝紶缁熺殑浜屾哀鍖栫鎶涘厜鎵╁睍鍒板閾溿€侀挩绛夐噾灞炰簰杩炲眰鐨勬姏鍏夛紝涔冭嚦瀵逛笁缁寸粨鏋勫FinFET鍜?D NAND瀛樺偍鐨勬姏鍏?zwnj;銆侟/p> <p>姝ゅ锛屽寲瀛︽満姊版姏鍏夋満杩樻槸涓€绉嶇敤浜庣數瀛愪笌閫氫俊鎶€鏈€佽埅绌恒€佽埅澶╃瀛︽妧鏈鍩熺殑宸ヨ壓璇曢獙浠櫒锛岃兘澶熺敤浜嶴i銆丼iC銆丟e銆丟aN绛夊崐瀵间綋鏉愭枡锛孲iO2銆丼i3N4銆丳SG銆丟eO銆丄l2O3绛変粙璐ㄥ眰浠ュ強Al鏅€氶噾灞炲拰Au銆丳t绛夋儼鎬ч噾灞炵殑鍖栧鏈烘鎶涘厜宸ヨ壓‌銆侟/p> <p>缁间笂鎵€杩帮紝<a href="/">鍖栧鏈烘鎶涘厜鏈裹/a>鏄竴绉嶉珮绮惧害銆佸鍔熻兘鐨勮〃闈㈠鐞嗚澶囷紝鍦ㄥ崐瀵间綋鍒堕€犲拰鍏朵粬楂樼鎶€棰嗗煙鍙戞尌鐫€閲嶈浣滅敤銆侟/p> </div> </div> <div class="tsemid-news-detial-bottom"> <div class="tsemid-news-detial-item"> <a href="/news/industry-consulting/index424.html" target="_blank"> <div class="type-1 font18 ">涓婁竴绡 <i></i></div> <div class="title-1 font16 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